Explore: Microlithographie
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Source: The Open Library
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1Principles of lithography
By Harry J. Levinson

“Principles of lithography” Metadata:
- Title: Principles of lithography
- Author: Harry J. Levinson
- Language: English
- Number of Pages: Median: 398
- Publisher: SPIE Press - SPIE
- Publish Date: 2001 - 2005 - 2019
- Publish Location: ➤ Bellingham, Wash - Bellingham, WA
“Principles of lithography” Subjects and Themes:
- Subjects: ➤ Microlithography - Integrated circuits - Design and construction - Circuits intégrés - Conception et construction - Microlithographie
Edition Identifiers:
- The Open Library ID: OL18729846M - OL31597110M - OL35846431M
- Online Computer Library Center (OCLC) ID: 45493267 - 1083675292
- Library of Congress Control Number (LCCN): 2004025977 - 00067126 - 2019003004
- All ISBNs: ➤ 9780819456601 - 9781510627604 - 9780819440457 - 0819440450 - 0819456608 - 151062760X
Access and General Info:
- First Year Published: 2001
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
Downloads Are Not Available:
The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.
Online Borrowing:
- Borrowing from Open Library: Borrowing link
- Borrowing from Archive.org: Borrowing link
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2Lithography process control
By Harry J. Levinson

“Lithography process control” Metadata:
- Title: Lithography process control
- Author: Harry J. Levinson
- Language: English
- Number of Pages: Median: 190
- Publisher: ➤ SPIE Optical Engineering Press - SPIE
- Publish Date: 1999
- Publish Location: Bellingham, Wash
“Lithography process control” Subjects and Themes:
- Subjects: ➤ Semiconductors - Quality control - Etching - Microlithography - Semi-conducteurs - Attaque chimique - Microlithographie - Qualité - Contrôle - TECHNOLOGY & ENGINEERING - Mechanical - Lithografie - Statistische Prozesslenkung - Commande de processus - Semiconducteurs - Lithographie (Halbleitertechnologie) - Semiconductors -- Etching - Microlithography -- Quality control
Edition Identifiers:
- The Open Library ID: OL382069M - OL46593856M
- Online Computer Library Center (OCLC) ID: 697188897
- Library of Congress Control Number (LCCN): 98044433
- All ISBNs: 9780819478559 - 9780819430526 - 0819430528 - 0819478555
Access and General Info:
- First Year Published: 1999
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
Downloads Are Not Available:
The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.
Online Borrowing:
- Borrowing from Open Library: Borrowing link
- Borrowing from Archive.org: Borrowing link
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3Fundamental Principles of Optical Lithography
By Chris Mack

“Fundamental Principles of Optical Lithography” Metadata:
- Title: ➤ Fundamental Principles of Optical Lithography
- Author: Chris Mack
- Language: English
- Number of Pages: Median: 534
- Publisher: ➤ Wiley & Sons, Incorporated, John - Wiley-Interscience - Wiley & Sons, Limited, John - Wiley
- Publish Date: 2008 - 2011
“Fundamental Principles of Optical Lithography” Subjects and Themes:
- Subjects: ➤ Integrated circuits - Microlithography - Photolithography - Semiconductors - Design and construction - Industrial applications - Circuits intégrés - Conception et construction - Microlithographie - Applications industrielles
Edition Identifiers:
- The Open Library ID: ➤ OL10296141M - OL29002679M - OL29087277M - OL10278254M - OL29087278M - OL33352675M
- Online Computer Library Center (OCLC) ID: 180190870
- Library of Congress Control Number (LCCN): 2007044548
- All ISBNs: ➤ 0470727306 - 111996508X - 1119965071 - 9780470723869 - 9781119965077 - 9780470727300 - 0470723874 - 9780470018934 - 9781119965084 - 0470723866 - 9780470723876 - 0470018933
Access and General Info:
- First Year Published: 2008
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
Online Access
Downloads Are Not Available:
The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.
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4Microlithography
By Kazuaki Suzuki and Bruce W. Smith
“Microlithography” Metadata:
- Title: Microlithography
- Authors: Kazuaki SuzukiBruce W. Smith
- Language: English
- Number of Pages: Median: 864
- Publisher: Taylor & Francis Group
- Publish Date: 2020
“Microlithography” Subjects and Themes:
- Subjects: ➤ Microlithography - Integrated circuits - Metal oxide semiconductors, complementary - Manufacturing processes - Industrial applications - Masks - Complementary Metal oxide semiconductors - Design and construction - Microlithographie - Applications industrielles - Circuits intégrés - Masques - Fabrication - Manufacturing - TECHNOLOGY - Lasers - Electronics - Microelectronics
Edition Identifiers:
- The Open Library ID: OL28055607M - OL28060756M - OL28055605M - OL28043698M - OL28060691M
- Online Computer Library Center (OCLC) ID: 1154017316
- All ISBNs: ➤ 9781439876756 - 1315117177 - 1351643444 - 9781439876763 - 1439876762 - 9781315117171 - 9781351643443 - 9781351633949 - 1439876754 - 1351633945
Access and General Info:
- First Year Published: 2020
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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5Microlithography
By Kazuaki Suzuki and Bruce W. Smith

“Microlithography” Metadata:
- Title: Microlithography
- Authors: Kazuaki SuzukiBruce W. Smith
- Language: English
- Number of Pages: Median: 864
- Publisher: ➤ CRC - Taylor & Francis Group - CRC Press
- Publish Date: 2007 - 2018
- Publish Location: Boca Raton
“Microlithography” Subjects and Themes:
- Subjects: ➤ Complementary Metal oxide semiconductors - Integrated circuits - Manufacturing processes - Microlithography - Industrial applications - Masks - Design and construction - Corrosion and anti-corrosives - Protective coatings - Microlithographie - Applications industrielles - Circuits intégrés - Masques - MOS complémentaires - Conception et construction - Fabrication - Manufacturing - TECHNOLOGY & ENGINEERING - Electronics - Circuits - General - Lithografie - Lithographie (Halbleitertechnologie)
Edition Identifiers:
- The Open Library ID: OL29046476M - OL18288544M - OL8160615M
- Online Computer Library Center (OCLC) ID: 71581976 - 137293053
- Library of Congress Control Number (LCCN): 2006031516
- All ISBNs: 1420051539 - 0824790243 - 9781420051537 - 9780824790240
Access and General Info:
- First Year Published: 2007
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
Online Access
Downloads Are Not Available:
The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.
Online Borrowing:
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6Introduction to microlithography

“Introduction to microlithography” Metadata:
- Title: ➤ Introduction to microlithography
- Language: English
- Number of Pages: Median: 363
- Publisher: The Society
- Publish Date: 1983
- Publish Location: Washington, D.C
“Introduction to microlithography” Subjects and Themes:
- Subjects: ➤ Microlithographie - Etching - Plasma etching - Gravure par plasma - Photoresists - Semiconductors - Congrès - Congresses - Résines photosensibles - Photolithographie - Microlithography - Photolithography
Edition Identifiers:
- The Open Library ID: OL3164086M
- Online Computer Library Center (OCLC) ID: 9371344
- Library of Congress Control Number (LCCN): 83005968
- All ISBNs: 0841207755 - 9780841207752
Access and General Info:
- First Year Published: 1983
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Printdisabled
Online Access
Downloads Are Not Available:
The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.
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7Microlithography
By James R. Sheats and Bruce W. Smith
“Microlithography” Metadata:
- Title: Microlithography
- Authors: James R. SheatsBruce W. Smith
- Language: English
- Number of Pages: Median: 780
- Publisher: Marcel Dekker
- Publish Date: 1998
- Publish Location: New York
“Microlithography” Subjects and Themes:
- Subjects: ➤ Microlithography - Industrial applications - Integrated circuits - Masks - Complementary Metal oxide semiconductors - Design and construction - Manufacturing processes - Microlithographie - Applications industrielles - Circuits intégrés - Masques - MOS complémentaires - Conception et construction - Fabrication - TECHNOLOGY & ENGINEERING - Mechanical
Edition Identifiers:
- The Open Library ID: OL45477175M
- Online Computer Library Center (OCLC) ID: 44960707
- All ISBNs: 0585139334 - 9780585139333
Access and General Info:
- First Year Published: 1998
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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8Electronic and photonic applications of polymers
By S. Richard Turner

“Electronic and photonic applications of polymers” Metadata:
- Title: ➤ Electronic and photonic applications of polymers
- Author: S. Richard Turner
- Language: English
- Number of Pages: Median: 372
- Publisher: American Chemical Society
- Publish Date: 1988
- Publish Location: Washington, DC
“Electronic and photonic applications of polymers” Subjects and Themes:
- Subjects: ➤ Reserves anti-acides - Microlithographie - Polymers - Lithographie - Polymeres and polymerisation - Materials - Congres - Materiaux - Electronique - Optique non lineaire - Microlithography - Polymerisation - Congresses - Photoresists - Photons - Polymeres
Edition Identifiers:
- The Open Library ID: OL2044190M
- Online Computer Library Center (OCLC) ID: 18191189
- Library of Congress Control Number (LCCN): 88021099
- All ISBNs: 084121400X - 9780841214002
Access and General Info:
- First Year Published: 1988
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Printdisabled
Online Access
Downloads Are Not Available:
The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.
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9Microlithography fundamentals in semiconductor devices and fabrication technology
By Saburo Nonogaki

“Microlithography fundamentals in semiconductor devices and fabrication technology” Metadata:
- Title: ➤ Microlithography fundamentals in semiconductor devices and fabrication technology
- Author: Saburo Nonogaki
- Language: English
- Number of Pages: Median: 327
- Publisher: Marcel Dekker
- Publish Date: 1998
- Publish Location: New York
“Microlithography fundamentals in semiconductor devices and fabrication technology” Subjects and Themes:
- Subjects: ➤ Microlithography - Photoresists - Semiconductors - Industrial applications - Manufacturing processes - Design and construction - Microlithographie - Applications industrielles - Fabrication - Résines photosensibles - Manufacturing - TECHNOLOGY & ENGINEERING - Mechanical - Semiconductors--design and construction - Microlithography--industrial applications - Tk7871.85 .n66 1998 - 621.3815/2
Edition Identifiers:
- The Open Library ID: OL345225M
- Online Computer Library Center (OCLC) ID: 45842890 - 38948131
- Library of Congress Control Number (LCCN): 98004222
- All ISBNs: 0824799518 - 9780824799519
Access and General Info:
- First Year Published: 1998
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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10Handbook of VLSI microlithography
By John N. Helbert

“Handbook of VLSI microlithography” Metadata:
- Title: ➤ Handbook of VLSI microlithography
- Author: John N. Helbert
- Language: English
- Publisher: ➤ Noyes Publications/William Andrew Pub.
- Publish Date: 2000
- Publish Location: Norwich, NY
“Handbook of VLSI microlithography” Subjects and Themes:
- Subjects: ➤ Very large scale integration - Microlithography - Integrated circuits - Integrated circuits, very large scale integration - Circuits intégrés à très grande échelle - Microlithographie - TECHNOLOGY & ENGINEERING - Electronics - Circuits - General
Edition Identifiers:
- The Open Library ID: OL6781112M
- Online Computer Library Center (OCLC) ID: 49708527
- Library of Congress Control Number (LCCN): 00028173
- All ISBNs: 9780815514442 - 0815514441
Access and General Info:
- First Year Published: 2000
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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