Handbook of VLSI microlithography - Info and Reading Options
principles, technology, and applications
By John N. Helbert

"Handbook of VLSI microlithography" was published by Noyes Publications/William Andrew Pub. in 2000 - Norwich, NY and the language of the book is English.
“Handbook of VLSI microlithography” Metadata:
- Title: ➤ Handbook of VLSI microlithography
- Author: John N. Helbert
- Language: English
- Publisher: ➤ Noyes Publications/William Andrew Pub.
- Publish Date: 2000
- Publish Location: Norwich, NY
“Handbook of VLSI microlithography” Subjects and Themes:
- Subjects: ➤ Very large scale integration - Microlithography - Integrated circuits - Integrated circuits, very large scale integration - Circuits intégrés à très grande échelle - Microlithographie - TECHNOLOGY & ENGINEERING - Electronics - Circuits - General
Edition Specifications:
- Pagination: p. cm.
Edition Identifiers:
- The Open Library ID: OL6781112M - OL18260807W
- Online Computer Library Center (OCLC) ID: 49708527
- Library of Congress Control Number (LCCN): 00028173
- ISBN-10: 0815514441
- All ISBNs: 0815514441
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