Fundamental Principles of Optical Lithography - Info and Reading Options
The Science of Microfabrication
By Chris Mack
"Fundamental Principles of Optical Lithography" is published by Wiley-Interscience in January 18, 2008, it has 534 pages and the language of the book is English.
“Fundamental Principles of Optical Lithography” Metadata:
- Title: ➤ Fundamental Principles of Optical Lithography
- Author: Chris Mack
- Language: English
- Number of Pages: 534
- Publisher: Wiley-Interscience
- Publish Date: January 18, 2008
“Fundamental Principles of Optical Lithography” Subjects and Themes:
- Subjects: ➤ Integrated circuits - Microlithography - Photolithography - Semiconductors - Design and construction - Industrial applications - Circuits intégrés - Conception et construction - Microlithographie - Applications industrielles
Edition Specifications:
- Format: Hardcover
- Weight: 2.6 pounds
- Dimensions: 9.9 x 6.8 x 1.4 inches
Edition Identifiers:
- The Open Library ID: OL10278254M - OL9367342W
- Online Computer Library Center (OCLC) ID: 180190870
- Library of Congress Control Number (LCCN): 2007044548
- ISBN-13: 9780470018934
- ISBN-10: 0470018933
- All ISBNs: 0470018933 - 9780470018934
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