Introduction to microlithography - Info and Reading Options
theory, materials, and processing
"Introduction to microlithography" was published by The Society in 1983 - Washington, D.C, it has 363 pages and the language of the book is English.
“Introduction to microlithography” Metadata:
- Title: ➤ Introduction to microlithography
- Language: English
- Number of Pages: 363
- Publisher: The Society
- Publish Date: 1983
- Publish Location: Washington, D.C
“Introduction to microlithography” Subjects and Themes:
- Subjects: ➤ Microlithographie - Etching - Plasma etching - Gravure par plasma - Photoresists - Semiconductors - Congrès - Congresses - Résines photosensibles - Photolithographie - Microlithography - Photolithography
Edition Specifications:
- Pagination: ix, 363 p. :
Edition Identifiers:
- The Open Library ID: OL3164086M - OL17846391W
- Online Computer Library Center (OCLC) ID: 9371344
- Library of Congress Control Number (LCCN): 83005968
- ISBN-10: 0841207755
- All ISBNs: 0841207755
AI-generated Review of “Introduction to microlithography”:
"Introduction to microlithography" Table Of Contents:
- 1- An introduction to lithography / L.F. Thompson
- 2- The lithographic process
- 3- the physics / L.F. Thompson and M.J. Bowden
- 4- Organic resist materials
- 5- theory and chemistry / C. Grant Willson
- 6- Resist processing / L.F. Thompson and M.J. Bowden
- 7- Plasma etching / J.A. Mucha and D.W. Hess
- 8- Multi-layer resist systems / B.J. Lin.
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