Principles of lithography - Info and Reading Options
By Harry J. Levinson
"Principles of lithography" was published by SPIE Press in 2005 - Bellingham, WA, it has 423 pages and the language of the book is English.
“Principles of lithography” Metadata:
- Title: Principles of lithography
- Author: Harry J. Levinson
- Language: English
- Number of Pages: 423
- Publisher: SPIE Press
- Publish Date: 2005
- Publish Location: Bellingham, WA
“Principles of lithography” Subjects and Themes:
- Subjects: ➤ Microlithography - Integrated circuits - Design and construction - Circuits intégrés - Conception et construction - Microlithographie
Edition Specifications:
- Pagination: xii, 423 p.
Edition Identifiers:
- The Open Library ID: OL31597110M - OL1978700W
- Library of Congress Control Number (LCCN): 2004025977
- ISBN-10: 0819456608
- All ISBNs: 0819456608
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