Microlithography fundamentals in semiconductor devices and fabrication technology - Info and Reading Options
By Saburo Nonogaki
"Microlithography fundamentals in semiconductor devices and fabrication technology" was published by Marcel Dekker in 1998 - New York, it has 327 pages and the language of the book is English.
“Microlithography fundamentals in semiconductor devices and fabrication technology” Metadata:
- Title: ➤ Microlithography fundamentals in semiconductor devices and fabrication technology
- Author: Saburo Nonogaki
- Language: English
- Number of Pages: 327
- Publisher: Marcel Dekker
- Publish Date: 1998
- Publish Location: New York
“Microlithography fundamentals in semiconductor devices and fabrication technology” Subjects and Themes:
- Subjects: ➤ Microlithography - Photoresists - Semiconductors - Industrial applications - Manufacturing processes - Design and construction - Microlithographie - Applications industrielles - Fabrication - Résines photosensibles - Manufacturing - TECHNOLOGY & ENGINEERING - Mechanical - Semiconductors--design and construction - Microlithography--industrial applications - Tk7871.85 .n66 1998 - 621.3815/2
Edition Specifications:
- Pagination: v, 327 p. :
Edition Identifiers:
- The Open Library ID: OL345225M - OL1809660W
- Online Computer Library Center (OCLC) ID: 45842890 - 38948131
- Library of Congress Control Number (LCCN): 98004222
- ISBN-10: 0824799518
- All ISBNs: 0824799518
AI-generated Review of “Microlithography fundamentals in semiconductor devices and fabrication technology”:
"Microlithography fundamentals in semiconductor devices and fabrication technology" Description:
The Open Library:
Ranging from the basic principles to the forefront of microlithography, this unique volume explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing.
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