Explore: Electron Beam Lithography
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AI-Generated Overview About “electron-beam-lithography”:
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Source: The Open Library
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1Electron-Beam, X Ray, and Ion-Beam Technology; Submicrometer Lithographics VII (Proceedings of SPIE--the International Society for Optical Engineering)
By Arnold W. Yanof

“Electron-Beam, X Ray, and Ion-Beam Technology; Submicrometer Lithographics VII (Proceedings of SPIE--the International Society for Optical Engineering)” Metadata:
- Title: ➤ Electron-Beam, X Ray, and Ion-Beam Technology; Submicrometer Lithographics VII (Proceedings of SPIE--the International Society for Optical Engineering)
- Author: Arnold W. Yanof
- Language: English
- Number of Pages: Median: 307
- Publisher: ➤ Society of Photo Optical - The Society
- Publish Date: 1988
- Publish Location: Bellingham, Wash., USA
“Electron-Beam, X Ray, and Ion-Beam Technology; Submicrometer Lithographics VII (Proceedings of SPIE--the International Society for Optical Engineering)” Subjects and Themes:
- Subjects: Electron beam Lithography - Congresses - Ion beam lithography - X-ray lithography
Edition Identifiers:
- The Open Library ID: OL2064539M - OL8231814M
- Online Computer Library Center (OCLC) ID: 18446375
- Library of Congress Control Number (LCCN): 88060782
- All ISBNs: 089252958X - 9780892529582
Access and General Info:
- First Year Published: 1988
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
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2Electron-Beam, X-Ray, and Ion-Beam Technology
By Douglas J. Resnick

“Electron-Beam, X-Ray, and Ion-Beam Technology” Metadata:
- Title: ➤ Electron-Beam, X-Ray, and Ion-Beam Technology
- Author: Douglas J. Resnick
- Language: English
- Number of Pages: Median: 344
- Publisher: ➤ SPIE--the International Society for Optical Engineering - SPIE-International Society for Optical Engine
- Publish Date: 1990
- Publish Location: Bellingham, Wash., USA
“Electron-Beam, X-Ray, and Ion-Beam Technology” Subjects and Themes:
- Subjects: Electron beam Lithography - Congresses - X-ray lithography - Ion beam lithography
Edition Identifiers:
- The Open Library ID: OL15302038M - OL11392660M
- Online Computer Library Center (OCLC) ID: 21914564
- Library of Congress Control Number (LCCN): 90060893
- All ISBNs: 0819403105 - 9780819403100
Access and General Info:
- First Year Published: 1990
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
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3Resists in microlithography and printing
By B. Bednář
“Resists in microlithography and printing” Metadata:
- Title: ➤ Resists in microlithography and printing
- Author: B. Bednář
- Language: English
- Number of Pages: Median: 376
- Publisher: Elsevier
- Publish Date: 1993
- Publish Location: Amsterdam - New York
“Resists in microlithography and printing” Subjects and Themes:
- Subjects: ➤ Design and construction - Electron beam Lithography - Integrated circuits - Microlithography - Semiconductors - Very large scale integration - X-ray lithography
Edition Identifiers:
- The Open Library ID: OL1704368M
- Library of Congress Control Number (LCCN): 92005585
- All ISBNs: 0444988467 - 9780444988461
Access and General Info:
- First Year Published: 1993
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
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4Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies IV

“Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies IV” Metadata:
- Title: ➤ Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies IV
- Language: English
- Number of Pages: Median: 219
- Publisher: ➤ SPIE--the International Society for Optical Engineering
- Publish Date: 1985
- Publish Location: Bellingham, Wash., USA
“Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies IV” Subjects and Themes:
- Subjects: Electron beam Lithography - Congresses - Ion beam lithography - X-ray lithography
Edition Identifiers:
- The Open Library ID: OL2555174M
- Library of Congress Control Number (LCCN): 85061233
- All ISBNs: 9780892525720 - 089252572X
Access and General Info:
- First Year Published: 1985
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
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5Dry processing for submicrometer lithography

“Dry processing for submicrometer lithography” Metadata:
- Title: ➤ Dry processing for submicrometer lithography
- Language: English
- Number of Pages: Median: 307
- Publisher: The Society
- Publish Date: 1990
- Publish Location: Bellingham, Wash., USA
“Dry processing for submicrometer lithography” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - Congresses - Etching - Plasma etching - Semiconductors - Ion beam lithography - Microelectronics - Microlithography - Photolithography
Edition Identifiers:
- The Open Library ID: OL2218016M
- Online Computer Library Center (OCLC) ID: 508158041
- Library of Congress Control Number (LCCN): 89043521
- All ISBNs: 9780819402219 - 0819402214
Access and General Info:
- First Year Published: 1990
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
Downloads Are Not Available:
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6Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing II

“Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing II” Metadata:
- Title: ➤ Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing II
- Language: English
- Number of Pages: Median: 488
- Publisher: SPIE
- Publish Date: 1992
- Publish Location: Bellingham, Wash
“Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing II” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - Congresses - Etching - Ion beam lithography - X-ray lithography - Semiconductors - Masks (Electronics)
Edition Identifiers:
- The Open Library ID: OL1746392M
- Online Computer Library Center (OCLC) ID: 26466509
- Library of Congress Control Number (LCCN): 92060181
- All ISBNs: 9780819408266 - 0819408263
Access and General Info:
- First Year Published: 1992
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
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7Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing IV

“Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing IV” Metadata:
- Title: ➤ Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing IV
- Language: English
- Number of Pages: Median: 420
- Publisher: SPIE
- Publish Date: 1994
- Publish Location: Bellingham, Wash
“Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing IV” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - Congresses - Etching - Ion beam lithography - X-ray lithography - Semiconductors - Masks (Electronics) - Lithography, electron beam
Edition Identifiers:
- The Open Library ID: OL1124522M
- Online Computer Library Center (OCLC) ID: 30614005
- Library of Congress Control Number (LCCN): 94065789
- All ISBNs: 0819414891 - 9780819414892
Access and General Info:
- First Year Published: 1994
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
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8Emerging lithographic technologies V
By Elizabeth A. Dobisz

“Emerging lithographic technologies V” Metadata:
- Title: ➤ Emerging lithographic technologies V
- Author: Elizabeth A. Dobisz
- Language: English
- Number of Pages: Median: 818
- Publisher: SPIE
- Publish Date: 2001
- Publish Location: Bellingham, Wash
“Emerging lithographic technologies V” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - Congresses - Microlithography - Industrial applications - X-ray lithography - X-rays - Masks (Electronics) - X-rays, industrial applications - Masks (electronics) - Lithography, electron beam
Edition Identifiers:
- The Open Library ID: OL3971422M
- Online Computer Library Center (OCLC) ID: 48153041
- Library of Congress Control Number (LCCN): 2001279005
- All ISBNs: 9780819440297 - 0819440299
Author's Alternative Names:
"Elizabeth Dobisz"Access and General Info:
- First Year Published: 2001
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
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9Emerging lithographic technologies II

“Emerging lithographic technologies II” Metadata:
- Title: ➤ Emerging lithographic technologies II
- Language: English
- Number of Pages: Median: 702
- Publisher: SPIE
- Publish Date: 1998
- Publish Location: Bellingham, Wash
“Emerging lithographic technologies II” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - X-rays - X-ray lithography - Congresses - Masks (Electronics) - Industrial applications - Microlithography
Edition Identifiers:
- The Open Library ID: OL63791M
- Online Computer Library Center (OCLC) ID: 39462033
- Library of Congress Control Number (LCCN): 99160757
- All ISBNs: 0819427764 - 9780819427762
Access and General Info:
- First Year Published: 1998
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
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10Emerging lithographic technologies VIII
By R. Scott Mackay

“Emerging lithographic technologies VIII” Metadata:
- Title: ➤ Emerging lithographic technologies VIII
- Author: R. Scott Mackay
- Language: English
- Number of Pages: Median: 1110
- Publisher: SPIE
- Publish Date: 2004
- Publish Location: Bellingham, Wash., USA
“Emerging lithographic technologies VIII” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - X-rays - X-ray lithography - Congresses - Masks (Electronics) - Industrial applications - Microlithography - Lithography, electron beam - X-rays, industrial applications - Electron beams
Edition Identifiers:
- The Open Library ID: OL3329381M
- Online Computer Library Center (OCLC) ID: 55686050
- Library of Congress Control Number (LCCN): 2004304504
- All ISBNs: 9780819452870 - 0819452874
Access and General Info:
- First Year Published: 2004
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
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11Emerging lithographic technologies

“Emerging lithographic technologies” Metadata:
- Title: ➤ Emerging lithographic technologies
- Language: English
- Number of Pages: Median: 412
- Publisher: SPIE
- Publish Date: 1997
- Publish Location: Bellingham, Wash
“Emerging lithographic technologies” Subjects and Themes:
- Subjects: ➤ Electron beams - Electron beam Lithography - X-rays - X-ray lithography - Congresses - Masks (Electronics) - Industrial applications - Lithography, electron beam - X-rays, industrial applications
Edition Identifiers:
- The Open Library ID: OL418388M
- Online Computer Library Center (OCLC) ID: 37533590
- Library of Congress Control Number (LCCN): 98122105
- All ISBNs: 9780819424624 - 0819424625
Access and General Info:
- First Year Published: 1997
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
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12Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III

“Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III” Metadata:
- Title: ➤ Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III
- Language: English
- Number of Pages: Median: 136
- Publisher: ➤ SPIE--the International Society for Optical Engineering
- Publish Date: 1984
- Publish Location: Bellingham, Wash., USA
“Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III” Subjects and Themes:
- Subjects: Electron beam Lithography - Congresses - Ion beam lithography - X-ray lithography
Edition Identifiers:
- The Open Library ID: OL2870262M
- Library of Congress Control Number (LCCN): 84050821
- All ISBNs: 0892525061 - 9780892525065
Access and General Info:
- First Year Published: 1984
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
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13Emerging lithographic technologies III

“Emerging lithographic technologies III” Metadata:
- Title: ➤ Emerging lithographic technologies III
- Language: English
- Number of Pages: Median: 864
- Publisher: SPIE
- Publish Date: 1999
- Publish Location: Bellingham, Wash
“Emerging lithographic technologies III” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - X-rays - X-ray lithography - Congresses - Masks (Electronics) - Industrial applications - Microlithography - Lithography, electron beam - X-rays, industrial applications
Edition Identifiers:
- The Open Library ID: OL6805852M
- Online Computer Library Center (OCLC) ID: 41946614
- Library of Congress Control Number (LCCN): 00268968
- All ISBNs: 9780819431509 - 0819431508
Access and General Info:
- First Year Published: 1999
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
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14Electron-beam, X-ray, and ion-beam technology
By Arnold W. Yanof

“Electron-beam, X-ray, and ion-beam technology” Metadata:
- Title: ➤ Electron-beam, X-ray, and ion-beam technology
- Author: Arnold W. Yanof
- Language: English
- Number of Pages: Median: 388
- Publisher: SPIE
- Publish Date: 1989
- Publish Location: Bellingham, Wash., USA
“Electron-beam, X-ray, and ion-beam technology” Subjects and Themes:
- Subjects: Electron beam Lithography - Congresses - Ion beam lithography - X-ray lithography
Edition Identifiers:
- The Open Library ID: OL2222711M
- Online Computer Library Center (OCLC) ID: 508208332
- Library of Congress Control Number (LCCN): 89060655
- All ISBNs: 0819401242 - 9780819401243
Access and General Info:
- First Year Published: 1989
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
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15Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V

“Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V” Metadata:
- Title: ➤ Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V
- Language: English
- Number of Pages: Median: 272
- Publisher: ➤ SPIE--the International Society for Optical Engineering
- Publish Date: 1986
- Publish Location: Bellingham, Wash., USA
“Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V” Subjects and Themes:
- Subjects: Electron beam Lithography - Congresses - Ion beam lithography - X-ray lithography - Microlithography
Edition Identifiers:
- The Open Library ID: OL2743457M
- Online Computer Library Center (OCLC) ID: 13981354
- Library of Congress Control Number (LCCN): 86061034
- All ISBNs: 089252667X - 9780892526673
Access and General Info:
- First Year Published: 1986
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
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16Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing V

“Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing V” Metadata:
- Title: ➤ Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing V
- Language: English
- Number of Pages: Median: 450
- Publisher: SPIE
- Publish Date: 1995
- Publish Location: Bellingham, Wash., USA
“Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing V” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - Congresses - Integrated circuits - Ion beam lithography - X-ray lithography - Masks - Extreme ultraviolet lithography - Lithography, electron beam - Masks (electronics)
Edition Identifiers:
- The Open Library ID: OL1126867M
- Online Computer Library Center (OCLC) ID: 32644238
- Library of Congress Control Number (LCCN): 94069900
- All ISBNs: 0819417858 - 9780819417855
Access and General Info:
- First Year Published: 1995
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
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17Emerging Lithographic Technologies VII
By Roxann L. Engelstad

“Emerging Lithographic Technologies VII” Metadata:
- Title: ➤ Emerging Lithographic Technologies VII
- Author: Roxann L. Engelstad
- Language: English
- Number of Pages: Median: 1142
- Publisher: SPIE
- Publish Date: 2003
- Publish Location: Bellingham, Wash
“Emerging Lithographic Technologies VII” Subjects and Themes:
- Subjects: ➤ X-ray lithography - X-rays, industrial applications - Lithography, electron beam - Masks (electronics) - Microlithography - Electron beam Lithography - Congresses - Industrial applications - X-rays - Masks (Electronics)
Edition Identifiers:
- The Open Library ID: OL3317522M
- Online Computer Library Center (OCLC) ID: 52543912
- Library of Congress Control Number (LCCN): 2004266489
- All ISBNs: 9780819448422 - 0819448427
Access and General Info:
- First Year Published: 2003
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Borrowable
Online Access
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18Nanofabrication
By Ampere A. Tseng

“Nanofabrication” Metadata:
- Title: Nanofabrication
- Author: Ampere A. Tseng
- Language: English
- Number of Pages: Median: 700
- Publisher: ➤ World Scientific Publishing Company - World Scientific Publishing Co Pte Ltd
- Publish Date: 2007 - 2008
“Nanofabrication” Subjects and Themes:
- Subjects: Nanostructured materials - Nanostructures - Electron beam Lithography - Scanning probe microscopy - Nanotechnology
Edition Identifiers:
- The Open Library ID: OL49245459M - OL13169842M - OL13169895M - OL49255880M
- Library of Congress Control Number (LCCN): 2008275080
- All ISBNs: ➤ 9789812705426 - 9781281933591 - 9812790896 - 1281933597 - 9812700765 - 9789812700766 - 9812705422 - 9789812790897
Access and General Info:
- First Year Published: 2007
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
Online Access
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19Emerging lithographic technologies XI
“Emerging lithographic technologies XI” Metadata:
- Title: ➤ Emerging lithographic technologies XI
- Language: English
- Publisher: SPIE
- Publish Date: 2007
- Publish Location: Bellingham, Wash
“Emerging lithographic technologies XI” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - X-rays - X-ray lithography - Congresses - Masks (Electronics) - Industrial applications - Microlithography - Lithography - X-rays, industrial applications - Masks (electronics)
Edition Identifiers:
- The Open Library ID: OL24063275M - OL23945576M
- Library of Congress Control Number (LCCN): 2009284503
- All ISBNs: 9780819466365 - 0819466360
Access and General Info:
- First Year Published: 2007
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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20Nanofabrication

“Nanofabrication” Metadata:
- Title: Nanofabrication
- Language: English
- Number of Pages: Median: 574
- Publisher: World Scientific
- Publish Date: 2008
- Publish Location: Hackensack, N.J - Singapore
“Nanofabrication” Subjects and Themes:
- Subjects: Nanostructured materials - Nanostructures - Electron beam Lithography - Scanning probe microscopy
Edition Identifiers:
- The Open Library ID: OL21560190M - OL21894432M
- Library of Congress Control Number (LCCN): 2008275080
- All ISBNs: 9789812700766 - 9812705422 - 9789812705426 - 9812700765
Access and General Info:
- First Year Published: 2008
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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21Emerging Lithographic Techniques VI
By Roxann L. Engelstad
“Emerging Lithographic Techniques VI” Metadata:
- Title: ➤ Emerging Lithographic Techniques VI
- Author: Roxann L. Engelstad
- Number of Pages: Median: 508
- Publisher: ➤ SPIE Society of Photo-Optical Instrumentation Engi
- Publish Date: 2002
“Emerging Lithographic Techniques VI” Subjects and Themes:
- Subjects: ➤ Microlithography - X-ray lithography - X-rays, industrial applications - Masks (electronics) - Lithography, electron beam - Electron beam Lithography - Congresses - Industrial applications - X-rays - Masks (Electronics)
Edition Identifiers:
- The Open Library ID: OL11393346M
- Online Computer Library Center (OCLC) ID: 50417948
- Library of Congress Control Number (LCCN): 2002512442
- All ISBNs: 9780819444349 - 0819444340
Access and General Info:
- First Year Published: 2002
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
Online Access
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22Emerging Lithographic Technologies 9
By R. Scott Mackay

“Emerging Lithographic Technologies 9” Metadata:
- Title: ➤ Emerging Lithographic Technologies 9
- Author: R. Scott Mackay
- Language: English
- Number of Pages: Median: 1286
- Publisher: ➤ SPIE-International Society for Optical Engine
- Publish Date: 2005
“Emerging Lithographic Technologies 9” Subjects and Themes:
- Subjects: ➤ Lithography, electron beam - Electron beams - X-ray lithography - X-rays, industrial applications - Electronics - Electron beam Lithography - Congresses - Microlithography - Industrial applications - X-rays - Masks (Electronics)
Edition Identifiers:
- The Open Library ID: OL11393594M
- Library of Congress Control Number (LCCN): 2006271122
- All ISBNs: 0819457310 - 9780819457318
Access and General Info:
- First Year Published: 2005
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
Online Access
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23The physics of submicron lithography
By Kamilʹ Akhmetovich Valiev

“The physics of submicron lithography” Metadata:
- Title: ➤ The physics of submicron lithography
- Author: Kamilʹ Akhmetovich Valiev
- Language: English
- Number of Pages: Median: 493
- Publisher: Plenum Press
- Publish Date: 1992
- Publish Location: New York
“The physics of submicron lithography” Subjects and Themes:
- Subjects: Electron beam Lithography - Ion beam lithography - Physics - X-ray lithography - Lithography, electron beam
Edition Identifiers:
- The Open Library ID: OL1560032M
- Online Computer Library Center (OCLC) ID: 24845420
- Library of Congress Control Number (LCCN): 91041122
- All ISBNs: 0306435780 - 9780306435782
Access and General Info:
- First Year Published: 1992
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Printdisabled
Online Access
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24Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii
By V. K. Popov
“Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii” Metadata:
- Title: ➤ Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii
- Author: V. K. Popov
- Language: rus
- Number of Pages: Median: 125
- Publisher: "Radio i svi͡a︡zʹ"
- Publish Date: 1985
- Publish Location: Moskva
“Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii” Subjects and Themes:
- Subjects: Electron beam Lithography - Ion beam lithography - Microelectronics
Edition Identifiers:
- The Open Library ID: OL2650233M
- Library of Congress Control Number (LCCN): 85231530
Access and General Info:
- First Year Published: 1985
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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25Metallic structures with reduced dimensions
By Johannes Romijn
“Metallic structures with reduced dimensions” Metadata:
- Title: ➤ Metallic structures with reduced dimensions
- Author: Johannes Romijn
- Languages: English - dut
- Number of Pages: Median: 136
- Publisher: Sine nomine
- Publish Date: 1991
- Publish Location: [s.l.]
“Metallic structures with reduced dimensions” Subjects and Themes:
- Subjects: Electron beam Lithography - Microelectronics - Thin films
Edition Identifiers:
- The Open Library ID: OL57086277M
- Online Computer Library Center (OCLC) ID: 25128289
Access and General Info:
- First Year Published: 1991
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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26Patterning of material layers in submicron region
By U. S. Tandon

“Patterning of material layers in submicron region” Metadata:
- Title: ➤ Patterning of material layers in submicron region
- Author: U. S. Tandon
- Language: English
- Number of Pages: Median: 183
- Publisher: J. Wiley
- Publish Date: 1993
- Publish Location: New York
“Patterning of material layers in submicron region” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - Integrated circuits - Ion beam lithograph - Masks - X-ray lithography - Masks (electronics) - Ion beam lithography
Edition Identifiers:
- The Open Library ID: OL1731542M
- Online Computer Library Center (OCLC) ID: 27036323
- Library of Congress Control Number (LCCN): 92036072
- All ISBNs: 0470220635 - 8122405614 - 9780470220634 - 9788122405613
Access and General Info:
- First Year Published: 1993
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Printdisabled
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27On electron beam lithography for LSI circuit fabrication
By Börje Åstrand
“On electron beam lithography for LSI circuit fabrication” Metadata:
- Title: ➤ On electron beam lithography for LSI circuit fabrication
- Author: Börje Åstrand
- Language: English
- Number of Pages: Median: 14
- Publisher: ➤ Royal Institute of Technology, Dept. of Applied Electronics
- Publish Date: 1979
- Publish Location: Stockholm
“On electron beam lithography for LSI circuit fabrication” Subjects and Themes:
Edition Identifiers:
- The Open Library ID: OL57190430M
- Online Computer Library Center (OCLC) ID: 7157665
Access and General Info:
- First Year Published: 1979
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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28Design technology co-optimization in the era of sub-resolution IC scaling
By Lars W. Liebmann
“Design technology co-optimization in the era of sub-resolution IC scaling” Metadata:
- Title: ➤ Design technology co-optimization in the era of sub-resolution IC scaling
- Author: Lars W. Liebmann
- Language: English
- Publisher: SPIE
- Publish Date: 2016
- Publish Location: Bellingham, Washington
“Design technology co-optimization in the era of sub-resolution IC scaling” Subjects and Themes:
- Subjects: Electron beam Lithography - Integrated circuits - Design and construction - Lithography, electron beam
Edition Identifiers:
- The Open Library ID: OL30399245M
- Library of Congress Control Number (LCCN): 2015032506
- All ISBNs: 9781628419054 - 1628419059
Access and General Info:
- First Year Published: 2016
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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29Electron-beam lithography contributions from Jena
By Peter Hahmann
“Electron-beam lithography contributions from Jena” Metadata:
- Title: ➤ Electron-beam lithography contributions from Jena
- Author: Peter Hahmann
- Language: English
- Number of Pages: Median: 167
- Publisher: Verlag Vopelius
- Publish Date: 2014
- Publish Location: Jena
“Electron-beam lithography contributions from Jena” Subjects and Themes:
- Subjects: Vistec Electron Beam GmbH - Electron beam Lithography - History
Edition Identifiers:
- The Open Library ID: OL30832382M
- Library of Congress Control Number (LCCN): 2015398480
- All ISBNs: 9783939718802 - 3939718807
Access and General Info:
- First Year Published: 2014
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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30Alternative lithographic technologies IV
By William Man-Wai Tong and Douglas J. Resnick
“Alternative lithographic technologies IV” Metadata:
- Title: ➤ Alternative lithographic technologies IV
- Authors: William Man-Wai TongDouglas J. Resnick
- Language: English
- Publisher: SPIE
- Publish Date: 2012
- Publish Location: Bellingham, Washington
“Alternative lithographic technologies IV” Subjects and Themes:
- Subjects: ➤ Extreme ultraviolet lithography - Congresses - Electron beam Lithography - Microlithography - Industrial applications - Masks (Electronics)
Edition Identifiers:
- The Open Library ID: OL30958467M
- Library of Congress Control Number (LCCN): 2013427479
- All ISBNs: 9780819489791 - 0819489794
Access and General Info:
- First Year Published: 2012
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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31Electon-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing

“Electon-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing” Metadata:
- Title: ➤ Electon-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing
- Language: English
- Number of Pages: Median: 340
- Publisher: SPIE
- Publish Date: 1991
- Publish Location: Bellingham, Wash
“Electon-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing” Subjects and Themes:
- Subjects: Electron beam Lithography - Congresses - Ion beam lithography - X-ray lithography
Edition Identifiers:
- The Open Library ID: OL1569586M
- Online Computer Library Center (OCLC) ID: 24449213
- Library of Congress Control Number (LCCN): 91061058
- All ISBNs: 9780819405647 - 0819405647
Access and General Info:
- First Year Published: 1991
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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32Dian zi shu bao guang wei na jia gong ji shu
By Wenqi Gu
“Dian zi shu bao guang wei na jia gong ji shu” Metadata:
- Title: ➤ Dian zi shu bao guang wei na jia gong ji shu
- Author: Wenqi Gu
- Language: chi
- Number of Pages: Median: 310
- Publisher: ➤ Beijing gong ye da xue chu ban she
- Publish Date: 2004
- Publish Location: Beijing
“Dian zi shu bao guang wei na jia gong ji shu” Subjects and Themes:
- Subjects: Electron beam Lithography - Ion beam lithography - Electron beams - Ion bombardment
Edition Identifiers:
- The Open Library ID: OL31313172M
- Online Computer Library Center (OCLC) ID: 57301583
- Library of Congress Control Number (LCCN): 2010406469
- All ISBNs: 7563913009 - 9787563913008
Access and General Info:
- First Year Published: 2004
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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33Lithography Asia 2008
By Alek C. Chen, Burn Lin and Anthony Yen
“Lithography Asia 2008” Metadata:
- Title: Lithography Asia 2008
- Authors: Alek C. ChenBurn LinAnthony Yen
- Language: English
- Publisher: SPIE
- Publish Date: 2008
- Publish Location: Bellingham, Wash
“Lithography Asia 2008” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - Congresses - Microlithography - Industrial applications - X-ray lithography - X-rays - Masks (Electronics)
Edition Identifiers:
- The Open Library ID: OL31161456M
- Online Computer Library Center (OCLC) ID: 314107068
- Library of Congress Control Number (LCCN): 2010287933
- All ISBNs: 0819473812 - 9780819473813
Access and General Info:
- First Year Published: 2008
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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34Emerging lithographic technologies X
“Emerging lithographic technologies X” Metadata:
- Title: ➤ Emerging lithographic technologies X
- Language: English
- Publisher: SPIE
- Publish Date: 2006
- Publish Location: Bellingham, Wash
“Emerging lithographic technologies X” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - X-rays - X-ray lithography - Congresses - Masks (Electronics) - Industrial applications - Microlithography - X-rays, industrial applications - Masks (electronics)
Edition Identifiers:
- The Open Library ID: OL16293028M
- Library of Congress Control Number (LCCN): 2007533259
- All ISBNs: 0819461946 - 9780819461940
Access and General Info:
- First Year Published: 2006
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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35Electron-beam technology in microelectronic fabrication
By George Raymond Brewer

“Electron-beam technology in microelectronic fabrication” Metadata:
- Title: ➤ Electron-beam technology in microelectronic fabrication
- Author: George Raymond Brewer
- Language: English
- Number of Pages: Median: 362
- Publisher: Academic Press
- Publish Date: 1980
- Publish Location: New York
“Electron-beam technology in microelectronic fabrication” Subjects and Themes:
- Subjects: Electron beam Lithography - Microelectronics - Electron beams
Edition Identifiers:
- The Open Library ID: OL4405824M
- Library of Congress Control Number (LCCN): 79008856
- All ISBNs: 012133550X - 9780121335502
Access and General Info:
- First Year Published: 1980
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Printdisabled
Online Access
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36Electron-beam, X-ray, & ion-beam techniques for submicrometer lithographies V
“Electron-beam, X-ray, & ion-beam techniques for submicrometer lithographies V” Metadata:
- Title: ➤ Electron-beam, X-ray, & ion-beam techniques for submicrometer lithographies V
- Language: English
- Number of Pages: Median: 272
- Publisher: ➤ SPIE--the International Society for Optical Engineering
- Publish Date: 1986
- Publish Location: Bellinham, Wash., USA
“Electron-beam, X-ray, & ion-beam techniques for submicrometer lithographies V” Subjects and Themes:
- Subjects: Electron beam Lithography - Congresses - Ion beam lithography - X-ray lithography
Edition Identifiers:
- The Open Library ID: OL16429722M
- All ISBNs: 089252667
Access and General Info:
- First Year Published: 1986
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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37Emerging lithographic technologies IV
By Elizabeth A. Dobisz

“Emerging lithographic technologies IV” Metadata:
- Title: ➤ Emerging lithographic technologies IV
- Author: Elizabeth A. Dobisz
- Language: English
- Number of Pages: Median: 900
- Publisher: SPIE
- Publish Date: 2000
- Publish Location: Bellingham, Wash
“Emerging lithographic technologies IV” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - X-rays - X-ray lithography - Congresses - Masks (Electronics) - Industrial applications - Microlithography - X-rays, industrial applications - Lithography, electron beam
Edition Identifiers:
- The Open Library ID: OL3963473M
- Online Computer Library Center (OCLC) ID: 44738861
- Library of Congress Control Number (LCCN): 2001267776
- All ISBNs: 9780819436153 - 0819436151
Author's Alternative Names:
"Elizabeth Dobisz"Access and General Info:
- First Year Published: 2000
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Printdisabled
Online Access
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38Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing III

“Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing III” Metadata:
- Title: ➤ Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing III
- Language: English
- Number of Pages: Median: 470
- Publisher: The Society
- Publish Date: 1993
- Publish Location: Bellingham, Wash
“Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing III” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - Congresses - Etching - Ion beam lithography - X-ray lithography - Semiconductors - Masks (Electronics)
Edition Identifiers:
- The Open Library ID: OL1445670M
- Online Computer Library Center (OCLC) ID: 28538564
- Library of Congress Control Number (LCCN): 93084071
- All ISBNs: 9780819411587 - 0819411582
Access and General Info:
- First Year Published: 1993
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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39EUV, X-ray, and neutron optics and sources
By Carolyn MacDonald, Kenneth Goldberg and Juan Maldonado

“EUV, X-ray, and neutron optics and sources” Metadata:
- Title: ➤ EUV, X-ray, and neutron optics and sources
- Authors: Carolyn MacDonaldKenneth GoldbergJuan Maldonado
- Language: English
- Number of Pages: Median: 394
- Publisher: SPIE
- Publish Date: 1999
- Publish Location: Bellingham, Wash., USA
“EUV, X-ray, and neutron optics and sources” Subjects and Themes:
- Subjects: ➤ Neutron sources - Electron beam Lithography - Congresses - Ion beam lithography - X-ray optics - Extreme ultraviolet lithography - X-rays, industrial applications - Lithography, electron beam - Grenz rays
Edition Identifiers:
- The Open Library ID: OL6900474M
- Online Computer Library Center (OCLC) ID: 43290164
- Library of Congress Control Number (LCCN): 00710730
- All ISBNs: 0819432539 - 9780819432537
Access and General Info:
- First Year Published: 1999
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Printdisabled
Online Access
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40Alternative lithographic technologies II
By Daniel J. C. Herr
“Alternative lithographic technologies II” Metadata:
- Title: ➤ Alternative lithographic technologies II
- Author: Daniel J. C. Herr
- Language: English
- Publisher: SPIE
- Publish Date: 2010
- Publish Location: Bellingham, Wash
“Alternative lithographic technologies II” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - Congresses - Microlithography - Masks (Electronics) - Industrial applications - Extreme ultraviolet lithography
Edition Identifiers:
- The Open Library ID: OL24482937M
- Online Computer Library Center (OCLC) ID: 659783697
- Library of Congress Control Number (LCCN): 2010459490
- All ISBNs: 0819480517 - 9780819480514
Access and General Info:
- First Year Published: 2010
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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41Nanometer structure electronics
By International Symposium on Nanometer Structure Electronics (1984 Toyonaka, Osaka University)
“Nanometer structure electronics” Metadata:
- Title: ➤ Nanometer structure electronics
- Author: ➤ International Symposium on Nanometer Structure Electronics (1984 Toyonaka, Osaka University)
- Language: English
- Number of Pages: Median: 215
- Publisher: Ohm
- Publish Date: 1985
- Publish Location: Tokyo, Japan
“Nanometer structure electronics” Subjects and Themes:
- Subjects: Congresses - Electron beam Lithography - Lithography, Electron beam - Microelectronics - Quantum electronics
Edition Identifiers:
- The Open Library ID: OL20777254M
- All ISBNs: 9780444878106 - 0444878106 - 9784274030697 - 4274030695
Access and General Info:
- First Year Published: 1985
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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42Microcircuit Engineering 80
By International Conference on Microlithography (1980 Amsterdam, The Netherlands)
“Microcircuit Engineering 80” Metadata:
- Title: Microcircuit Engineering 80
- Author: ➤ International Conference on Microlithography (1980 Amsterdam, The Netherlands)
- Language: English
- Number of Pages: Median: 566
- Publisher: The University
- Publish Date: 1981
- Publish Location: Delft
“Microcircuit Engineering 80” Subjects and Themes:
Edition Identifiers:
- The Open Library ID: OL20711930M
- All ISBNs: 9062750605 - 9789062750603
Access and General Info:
- First Year Published: 1981
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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43Proceedings of the 1983 International Symposium on Electron, Ion, and Photon Beams
By International Symposium on Electron, Ion, and Photon Beams (1st 1983 Los Angeles, Calif.)
“Proceedings of the 1983 International Symposium on Electron, Ion, and Photon Beams” Metadata:
- Title: ➤ Proceedings of the 1983 International Symposium on Electron, Ion, and Photon Beams
- Author: ➤ International Symposium on Electron, Ion, and Photon Beams (1st 1983 Los Angeles, Calif.)
- Language: English
- Number of Pages: Median: 1400
- Publisher: ➤ published for the American Vacuum Society by the American Institute of Physics
- Publish Date: 1983
- Publish Location: New York
“Proceedings of the 1983 International Symposium on Electron, Ion, and Photon Beams” Subjects and Themes:
- Subjects: ➤ Congresses - Electron beam Lithography - Electron beams - Industrial applications - Ion bombardment - Lithography, Electron beam - Photolithography - Photon beams - Photoresists
Edition Identifiers:
- The Open Library ID: OL22147961M
- Library of Congress Control Number (LCCN): 83072987
- All ISBNs: 9780883184318 - 0883184311
Access and General Info:
- First Year Published: 1983
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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44Alternative lithographic technologies
By F. M. Schellenberg and Bruno M. La Fontaine
“Alternative lithographic technologies” Metadata:
- Title: ➤ Alternative lithographic technologies
- Authors: F. M. SchellenbergBruno M. La Fontaine
- Language: English
- Publisher: SPIE
- Publish Date: 2009
- Publish Location: Bellingham, Wash
“Alternative lithographic technologies” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - Congresses - Microlithography - Masks (Electronics) - Industrial applications - Extreme ultraviolet lithography
Edition Identifiers:
- The Open Library ID: OL24544997M
- Online Computer Library Center (OCLC) ID: 355813963
- Library of Congress Control Number (LCCN): 2010455661
- All ISBNs: 0819475246 - 9780819475244
Access and General Info:
- First Year Published: 2009
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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45Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York
By International Symposium on Electron, Ion, and Photon Beams (2nd 1984 Tarrytown, N.Y.)
“Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York” Metadata:
- Title: ➤ Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York
- Author: ➤ International Symposium on Electron, Ion, and Photon Beams (2nd 1984 Tarrytown, N.Y.)
- Language: English
- Number of Pages: Median: 463
- Publisher: ➤ Published for the American Vacuum Society by the American Institute of Physics
- Publish Date: 1985
- Publish Location: New York
“Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York” Subjects and Themes:
- Subjects: ➤ Congresses - Electron beam Lithography - Etching - Ion beam lithography - Lithography, Electron beam - Photolithography - Semiconductors
Edition Identifiers:
- The Open Library ID: OL14751693M
- Library of Congress Control Number (LCCN): 84073561
- All ISBNs: 0883184648 - 9780883184646
Access and General Info:
- First Year Published: 1985
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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46Digest of papers, XEL '1997
By International Workshop on X-ray and Extreme Ultraviolet Lithography (1997 Yokohama, Japan)
“Digest of papers, XEL '1997” Metadata:
- Title: Digest of papers, XEL '1997
- Author: ➤ International Workshop on X-ray and Extreme Ultraviolet Lithography (1997 Yokohama, Japan)
- Language: English
- Publisher: ➤ Japan Society for the Promotion of Sciences?
- Publish Date: 1997
- Publish Location: [Tokyo
“Digest of papers, XEL '1997” Subjects and Themes:
- Subjects: ➤ Congresses - Electron beam Lithography - Industrial applications - Lithography, Electron beam - Ultraviolet radiation - X-ray lithography
Edition Identifiers:
- The Open Library ID: OL20047602M
Access and General Info:
- First Year Published: 1997
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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47Technology of proximal probe lithography

“Technology of proximal probe lithography” Metadata:
- Title: ➤ Technology of proximal probe lithography
- Language: English
- Number of Pages: Median: 413
- Publisher: SPIE Optical Engineering Press
- Publish Date: 1993
- Publish Location: Bellingham, Wash
“Technology of proximal probe lithography” Subjects and Themes:
- Subjects: ➤ Probes (Electronic instruments) - Nanotechnology - Electron beam Lithography - Molecular electronics
Edition Identifiers:
- The Open Library ID: OL1400875M
- Online Computer Library Center (OCLC) ID: 28215980
- Library of Congress Control Number (LCCN): 93008684
- All ISBNs: 9780819412331 - 9780819412324 - 0819412325 - 0819412333
Access and General Info:
- First Year Published: 1993
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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48Electron-beam, x-ray, and ion-beam lithographies VI

“Electron-beam, x-ray, and ion-beam lithographies VI” Metadata:
- Title: ➤ Electron-beam, x-ray, and ion-beam lithographies VI
- Language: English
- Number of Pages: Median: 265
- Publisher: The Society
- Publish Date: 1987
- Publish Location: Bellingham, Wash., USA
“Electron-beam, x-ray, and ion-beam lithographies VI” Subjects and Themes:
- Subjects: Electron beam Lithography - Congresses - Ion beam lithography - X-ray lithography - Microlithography
Edition Identifiers:
- The Open Library ID: OL2410840M
- Online Computer Library Center (OCLC) ID: 506773759
- Library of Congress Control Number (LCCN): 87060741
- All ISBNs: 0892528087 - 9780892528080
Access and General Info:
- First Year Published: 1987
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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49Emerging Lithographic Technologies XII
By Frank Schellenberg
“Emerging Lithographic Technologies XII” Metadata:
- Title: ➤ Emerging Lithographic Technologies XII
- Author: Frank Schellenberg
- Language: English
- Number of Pages: Median: 1144
- Publisher: SPIE
- Publish Date: 2008
“Emerging Lithographic Technologies XII” Subjects and Themes:
- Subjects: ➤ Lithography, electron beam - Microlithography - X-ray lithography - Masks (electronics) - X-rays, industrial applications - Electron beam Lithography - Congresses - Industrial applications - X-rays - Masks (Electronics)
Edition Identifiers:
- The Open Library ID: OL28474284M
- Library of Congress Control Number (LCCN): 2010287918
- All ISBNs: 0819471062 - 9780819471062
Access and General Info:
- First Year Published: 2008
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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50Alternative lithographic technologies III
By Daniel J. C. Herr
“Alternative lithographic technologies III” Metadata:
- Title: ➤ Alternative lithographic technologies III
- Author: Daniel J. C. Herr
- Language: English
- Publisher: SPIE
- Publish Date: 2011
- Publish Location: Bellingham, Wash
“Alternative lithographic technologies III” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - Congresses - Microlithography - Masks (Electronics) - Industrial applications - Extreme ultraviolet lithography
Edition Identifiers:
- The Open Library ID: OL25284167M
- Online Computer Library Center (OCLC) ID: 751794121
- Library of Congress Control Number (LCCN): 2012360952
- All ISBNs: 9780819485298 - 0819485292
Access and General Info:
- First Year Published: 2011
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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