Explore: Ion Beam Lithograph
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Books Results
Source: The Open Library
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1Patterning of material layers in submicron region
By U. S. Tandon
“Patterning of material layers in submicron region” Metadata:
- Title: ➤ Patterning of material layers in submicron region
- Author: U. S. Tandon
- Language: English
- Number of Pages: Median: 183
- Publisher: J. Wiley
- Publish Date: 1993
- Publish Location: New York
“Patterning of material layers in submicron region” Subjects and Themes:
- Subjects: ➤ Electron beam Lithography - Integrated circuits - Ion beam lithograph - Masks - X-ray lithography - Masks (electronics) - Ion beam lithography
Edition Identifiers:
- The Open Library ID: OL1731542M
- Online Computer Library Center (OCLC) ID: 27036323
- Library of Congress Control Number (LCCN): 92036072
- All ISBNs: 0470220635 - 8122405614 - 9780470220634 - 9788122405613
Access and General Info:
- First Year Published: 1993
- Is Full Text Available: Yes
- Is The Book Public: No
- Access Status: Printdisabled
Online Access
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