Emerging Lithographic Technologies XII - Info and Reading Options
26-28 February 2008, San Jose, California, USA
By Frank Schellenberg
"Emerging Lithographic Technologies XII" was published by SPIE in 2008, it has 1144 pages and the language of the book is English.
“Emerging Lithographic Technologies XII” Metadata:
- Title: ➤ Emerging Lithographic Technologies XII
- Author: Frank Schellenberg
- Language: English
- Number of Pages: 1144
- Publisher: SPIE
- Publish Date: 2008
“Emerging Lithographic Technologies XII” Subjects and Themes:
- Subjects: ➤ Lithography, electron beam - Microlithography - X-ray lithography - Masks (electronics) - X-rays, industrial applications - Electron beam Lithography - Congresses - Industrial applications - X-rays - Masks (Electronics)
Edition Identifiers:
- The Open Library ID: OL28474284M - OL21035642W
- Library of Congress Control Number (LCCN): 2010287918
- ISBN-13: 9780819471062
- All ISBNs: 9780819471062
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