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Introduction To Microlithography
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1Introduction To Microlithography : Theory, Materials, And Processing : Based On A Workshop Sponsored By The ACS Division Of Organic Coatings And Plastics Chemistry At The 185th Meeting Of The American Chemical Society, Seattle, Washington, March 20-25, 1983
By Thompson, L. F., 1944-,Willson, C. G. (C. Grant), 1939-,Bowden, M. J., 1943-,American Chemical Society. Division of Organic Coatings and Plastics Chemistry,American Chemical Society. Meeting (185th : 1983 : Seattle, Wash.)
“Introduction To Microlithography : Theory, Materials, And Processing : Based On A Workshop Sponsored By The ACS Division Of Organic Coatings And Plastics Chemistry At The 185th Meeting Of The American Chemical Society, Seattle, Washington, March 20-25, 1983” Metadata:
- Title: ➤ Introduction To Microlithography : Theory, Materials, And Processing : Based On A Workshop Sponsored By The ACS Division Of Organic Coatings And Plastics Chemistry At The 185th Meeting Of The American Chemical Society, Seattle, Washington, March 20-25, 1983
- Author: ➤ Thompson, L. F., 1944-,Willson, C. G. (C. Grant), 1939-,Bowden, M. J., 1943-,American Chemical Society. Division of Organic Coatings and Plastics Chemistry,American Chemical Society. Meeting (185th : 1983 : Seattle, Wash.)
- Language: English
“Introduction To Microlithography : Theory, Materials, And Processing : Based On A Workshop Sponsored By The ACS Division Of Organic Coatings And Plastics Chemistry At The 185th Meeting Of The American Chemical Society, Seattle, Washington, March 20-25, 1983” Subjects and Themes:
- Subjects: ➤ Microlithography - Photoresists - Plasma etching - Semiconductors - Photolithographie - Résines photosensibles - Gravure par plasma - Microlithographie - Microlithography Congresses - Photoresists Congresses - Plasma etching Congresses - Semiconductors Etching Congresses
Edition Identifiers:
- Internet Archive ID: introductiontomi0000thom
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The book is available for download in "texts" format, the size of the file-s is: 1350.61 Mbs, the file-s for this book were downloaded 135 times, the file-s went public at Thu Feb 22 2018.
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