Introduction to microlithography - Info and Reading Options
By Larry F. Thompson, Murrae J. Bowden and C. Grant Willson
"Introduction to microlithography" was published by American Chemical Society in 1994 - Washington, DC, it has 527 pages and the language of the book is English.
“Introduction to microlithography” Metadata:
- Title: ➤ Introduction to microlithography
- Authors: Larry F. ThompsonMurrae J. BowdenC. Grant Willson
- Language: English
- Number of Pages: 527
- Publisher: American Chemical Society
- Publish Date: 1994
- Publish Location: Washington, DC
“Introduction to microlithography” Subjects and Themes:
- Subjects: ➤ Congresses - Etching - Plasma etching - Photoresists - Semiconductors - Microlithography
Edition Specifications:
- Pagination: xiv, 527 p. :
Edition Identifiers:
- The Open Library ID: OL1430612M - OL18892733W
- Online Computer Library Center (OCLC) ID: 29359317
- Library of Congress Control Number (LCCN): 93042023
- ISBN-10: 0841228485
- All ISBNs: 0841228485
AI-generated Review of “Introduction to microlithography”:
"Introduction to microlithography" Table Of Contents:
- 1- An introduction to lithography / Larry F. Thompson
- 2- The lithographic process / Murrae J. Bowden
- 3- Organic resist materials / C. Grant Willson
- 4- Resist processing / Larry Thompson
- 5- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil.
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