Explore: Electron Lithography
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Source: The Open Library
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1Dian zi shu sao miao pu guang ji shu
By Kehua Wu
“Dian zi shu sao miao pu guang ji shu” Metadata:
- Title: ➤ Dian zi shu sao miao pu guang ji shu
- Author: Kehua Wu
- Language: chi
- Number of Pages: Median: 425
- Publisher: ➤ Xin hua shu dian Beijing fa xing suo fa xing - Yu hang chu ban she
- Publish Date: 1985
- Publish Location: [Peking]
“Dian zi shu sao miao pu guang ji shu” Subjects and Themes:
- Subjects: Electron Lithography - Electron beams - Ion beam lithography - Ion bombardment - Lithography, Electron
Edition Identifiers:
- The Open Library ID: OL16466083M
- Library of Congress Control Number (LCCN): 86189134
Access and General Info:
- First Year Published: 1985
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: No_ebook
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Wiki
Source: Wikipedia
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Electron-beam lithography
Electron-beam lithography (often abbreviated as e-beam lithography or EBL) is the practice of scanning a focused beam of electrons to draw custom shapes
Maskless lithography
used form of maskless lithography today is electron beam lithography. Its widespread use is due to the wide range of electron beam systems available
Electron-beam technology
cable-isolation treatment, in electron lithography of sub-micrometer and nano-dimensional images, in microelectronics for electron-beam curing of color printing
Photolithography
as electron beam lithography, X-ray lithography, extreme ultraviolet lithography and ion projection lithography. Extreme ultraviolet lithography has
Next-generation lithography
any lithography method which uses a shorter-wavelength light or beam type than the current state of the art, such as X-ray lithography, electron beam
ASML Holding
shortened to ASML, originally standing for Advanced Semiconductor Materials Lithography) is a Dutch multinational corporation that specializes in the development
Extreme ultraviolet lithography
Extreme ultraviolet lithography (EUVL, also known simply as EUV) is a technology used in the semiconductor industry for manufacturing integrated circuits
X-ray lithography
prints. X-rays generate secondary electrons as in the cases of extreme ultraviolet lithography and electron beam lithography. While the fine pattern definition
Soft lithography
over other forms of lithography (such as photolithography and electron beam lithography). They include the following: Lower cost than traditional photolithography
Lithography
Lithography (from Ancient Greek λίθος (líthos) 'stone' and γράφω (gráphō) 'to write') is a planographic method of printing originally based on the immiscibility