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1Nanoparticle engineering for chemical-mechanical planarization

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“Nanoparticle engineering for chemical-mechanical planarization” Metadata:

  • Title: ➤  Nanoparticle engineering for chemical-mechanical planarization
  • Author:
  • Language: English
  • Number of Pages: Median: 222
  • Publisher: ➤  CRC - Taylor & Francis - Taylor & Francis Group - CRC Press
  • Publish Date:

“Nanoparticle engineering for chemical-mechanical planarization” Subjects and Themes:

Edition Identifiers:

Access and General Info:

  • First Year Published: 2008
  • Is Full Text Available: No
  • Is The Book Public: No
  • Access Status: No_ebook

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    2Tribology in chemical-mechanical planarization

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    “Tribology in chemical-mechanical planarization” Metadata:

    • Title: ➤  Tribology in chemical-mechanical planarization
    • Authors:
    • Language: English
    • Number of Pages: Median: 199
    • Publisher: ➤  Taylor & Francis Group - Taylor & Francis - CRC
    • Publish Date:
    • Publish Location: Boca Raton, Fla

    “Tribology in chemical-mechanical planarization” Subjects and Themes:

    Edition Identifiers:

    First Setence:

    "In the microelectronics community, the acronym CMP has been interpreted as either chemical-mechanical polishing or chemical-mechanical planarization."

    Access and General Info:

    • First Year Published: 2005
    • Is Full Text Available: No
    • Is The Book Public: No
    • Access Status: No_ebook

    Online Access

    Downloads Are Not Available:

    The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.

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      3Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses

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      Book's cover

      “Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses” Metadata:

      • Title: ➤  Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
      • Authors:
      • Language: English
      • Number of Pages: Median: 243
      • Publisher: ➤  Springer - Kluwer Academic Publishers - Springer London, Limited
      • Publish Date:
      • Publish Location: Boston

      “Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses” Subjects and Themes:

      Edition Identifiers:

      First Setence:

      "For many years integrated circuit (IC) interconnect structures were relatively simple, as the main IC processing concern was fabrication of higher density transistors."

      Access and General Info:

      • First Year Published: 2002
      • Is Full Text Available: No
      • Is The Book Public: No
      • Access Status: No_ebook

      Online Access

      Downloads Are Not Available:

      The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.

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        4Microelectronic Applications of Chemical Mechanical Planarization

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        “Microelectronic Applications of Chemical Mechanical Planarization” Metadata:

        • Title: ➤  Microelectronic Applications of Chemical Mechanical Planarization
        • Author:
        • Language: English
        • Number of Pages: Median: 747
        • Publisher: ➤  Wiley & Sons, Incorporated, John - Wiley & Sons Canada, Limited, John - Wiley-Interscience
        • Publish Date:

        “Microelectronic Applications of Chemical Mechanical Planarization” Subjects and Themes:

        Edition Identifiers:

        Access and General Info:

        • First Year Published: 2007
        • Is Full Text Available: No
        • Is The Book Public: No
        • Access Status: No_ebook

        Online Access

        Downloads Are Not Available:

        The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.

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          5Chemical mechanical planarization of microelectronic materials

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          “Chemical mechanical planarization of microelectronic materials” Metadata:

          • Title: ➤  Chemical mechanical planarization of microelectronic materials
          • Author:
          • Language: English
          • Number of Pages: Median: 337
          • Publisher: ➤  Wiley & Sons, Incorporated, John - Wiley & Sons, Limited, John - J. Wiley
          • Publish Date:
          • Publish Location: New York

          “Chemical mechanical planarization of microelectronic materials” Subjects and Themes:

          Edition Identifiers:

          Access and General Info:

          • First Year Published: 1997
          • Is Full Text Available: No
          • Is The Book Public: No
          • Access Status: No_ebook

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          6Chemical Mechanical Planarization of Semiconductor Materials

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          “Chemical Mechanical Planarization of Semiconductor Materials” Metadata:

          • Title: ➤  Chemical Mechanical Planarization of Semiconductor Materials
          • Author:
          • Language: English
          • Number of Pages: Median: 425
          • Publisher: Springer
          • Publish Date:

          “Chemical Mechanical Planarization of Semiconductor Materials” Subjects and Themes:

          Edition Identifiers:

          Access and General Info:

          • First Year Published: 2004
          • Is Full Text Available: No
          • Is The Book Public: No
          • Access Status: No_ebook

          Online Access

          Downloads Are Not Available:

          The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.

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            7Chemical-Mechanical Polishing 2001--Advances and Future Challenges

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            “Chemical-Mechanical Polishing 2001--Advances and Future Challenges” Metadata:

            • Title: ➤  Chemical-Mechanical Polishing 2001--Advances and Future Challenges
            • Author:
            • Language: English
            • Number of Pages: Median: 304
            • Publisher: Materials Research Society
            • Publish Date:
            • Publish Location: Warrendale, Pa

            “Chemical-Mechanical Polishing 2001--Advances and Future Challenges” Subjects and Themes:

            Edition Identifiers:

            Access and General Info:

            • First Year Published: 2001
            • Is Full Text Available: No
            • Is The Book Public: No
            • Access Status: No_ebook

            Online Access

            Downloads Are Not Available:

            The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.

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              8Advances in Chemical Mechanical Planarization (CMP)

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              “Advances in Chemical Mechanical Planarization (CMP)” Metadata:

              • Title: ➤  Advances in Chemical Mechanical Planarization (CMP)
              • Author:
              • Language: English
              • Number of Pages: Median: 536
              • Publisher: Elsevier Science & Technology
              • Publish Date:

              “Advances in Chemical Mechanical Planarization (CMP)” Subjects and Themes:

              Edition Identifiers:

              Access and General Info:

              • First Year Published: 2016
              • Is Full Text Available: No
              • Is The Book Public: No
              • Access Status: No_ebook

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              9Handōtai CMP yōgo jiten

              “Handōtai CMP yōgo jiten” Metadata:

              • Title: Handōtai CMP yōgo jiten
              • Language: jpn
              • Number of Pages: Median: 262
              • Publisher: Ōmusha
              • Publish Date:
              • Publish Location: Tōkyō

              “Handōtai CMP yōgo jiten” Subjects and Themes:

              Edition Identifiers:

              Access and General Info:

              • First Year Published: 2008
              • Is Full Text Available: No
              • Is The Book Public: No
              • Access Status: No_ebook

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              10Chemical-Mechanical Planarization

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              Book's cover

              “Chemical-Mechanical Planarization” Metadata:

              • Title: ➤  Chemical-Mechanical Planarization
              • Authors:
              • Language: English
              • Number of Pages: Median: 356
              • Publisher: ➤  University of Cambridge ESOL Examinations - Materials Research Society - Cambridge University Press
              • Publish Date:
              • Publish Location: Warrendale, Pa

              “Chemical-Mechanical Planarization” Subjects and Themes:

              Edition Identifiers:

              Access and General Info:

              • First Year Published: 2003
              • Is Full Text Available: No
              • Is The Book Public: No
              • Access Status: No_ebook

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              11Chemical-mechanical polishing, fundamentals and challenges

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              Book's cover

              “Chemical-mechanical polishing, fundamentals and challenges” Metadata:

              • Title: ➤  Chemical-mechanical polishing, fundamentals and challenges
              • Authors:
              • Language: English
              • Number of Pages: Median: 281
              • Publisher: Materials Research Society
              • Publish Date:
              • Publish Location: Warrendale, Pa

              “Chemical-mechanical polishing, fundamentals and challenges” Subjects and Themes:

              Edition Identifiers:

              Access and General Info:

              • First Year Published: 1999
              • Is Full Text Available: No
              • Is The Book Public: No
              • Access Status: No_ebook

              Online Access

              Downloads Are Not Available:

              The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.

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                12Chemical-Mechanical Planarization--Integration, Technology and Reliability

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                “Chemical-Mechanical Planarization--Integration, Technology and Reliability” Metadata:

                • Title: ➤  Chemical-Mechanical Planarization--Integration, Technology and Reliability
                • Author:
                • Language: English
                • Number of Pages: Median: 302
                • Publisher: Materials Research Society
                • Publish Date:

                “Chemical-Mechanical Planarization--Integration, Technology and Reliability” Subjects and Themes:

                Edition Identifiers:

                Access and General Info:

                • First Year Published: 2005
                • Is Full Text Available: No
                • Is The Book Public: No
                • Access Status: No_ebook

                Online Access

                Downloads Are Not Available:

                The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.

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                  13Chemical Mechanical Polishing Equipment and Materials

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                  “Chemical Mechanical Polishing Equipment and Materials” Metadata:

                  • Title: ➤  Chemical Mechanical Polishing Equipment and Materials
                  • Author:
                  • Language: English
                  • Number of Pages: Median: 166
                  • Publisher: ➤  Business Communications Company
                  • Publish Date:

                  “Chemical Mechanical Polishing Equipment and Materials” Subjects and Themes:

                  Edition Identifiers:

                  Access and General Info:

                  • First Year Published: 2003
                  • Is Full Text Available: No
                  • Is The Book Public: No
                  • Access Status: No_ebook

                  Online Access

                  Downloads Are Not Available:

                  The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.

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                    14Chemical Mechanical Planarization in Ic Device Manufacturing (Proceedings / Electrochemical Society)

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                    “Chemical Mechanical Planarization in Ic Device Manufacturing (Proceedings / Electrochemical Society)” Metadata:

                    • Title: ➤  Chemical Mechanical Planarization in Ic Device Manufacturing (Proceedings / Electrochemical Society)
                    • Author:
                    • Language: English
                    • Number of Pages: Median: 273
                    • Publisher: Electrochemical Society
                    • Publish Date:

                    “Chemical Mechanical Planarization in Ic Device Manufacturing (Proceedings / Electrochemical Society)” Subjects and Themes:

                    Edition Identifiers:

                    Access and General Info:

                    • First Year Published: 1998
                    • Is Full Text Available: No
                    • Is The Book Public: No
                    • Access Status: No_ebook

                    Online Access

                    Downloads Are Not Available:

                    The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.

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                      15Chemical Mechanical Planarization in IC Device Manufaturing III

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                      Book's cover

                      “Chemical Mechanical Planarization in IC Device Manufaturing III” Metadata:

                      • Title: ➤  Chemical Mechanical Planarization in IC Device Manufaturing III
                      • Author: ➤  
                      • Language: English
                      • Number of Pages: Median: 644
                      • Publisher: ➤  The Electrochemical Society, Inc.
                      • Publish Date:

                      “Chemical Mechanical Planarization in IC Device Manufaturing III” Subjects and Themes:

                      Edition Identifiers:

                      Access and General Info:

                      • First Year Published: 2000
                      • Is Full Text Available: No
                      • Is The Book Public: No
                      • Access Status: No_ebook

                      Online Access

                      Downloads Are Not Available:

                      The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.

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                        16Chemical-Mechanical Polishing 2000-Fundamentals and Materials Issues

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                        Book's cover

                        “Chemical-Mechanical Polishing 2000-Fundamentals and Materials Issues” Metadata:

                        • Title: ➤  Chemical-Mechanical Polishing 2000-Fundamentals and Materials Issues
                        • Author: ➤  
                        • Language: English
                        • Number of Pages: Median: 161
                        • Publisher: Materials Research Society
                        • Publish Date:

                        “Chemical-Mechanical Polishing 2000-Fundamentals and Materials Issues” Subjects and Themes:

                        Edition Identifiers:

                        Access and General Info:

                        • First Year Published: 2001
                        • Is Full Text Available: No
                        • Is The Book Public: No
                        • Access Status: No_ebook

                        Online Access

                        Downloads Are Not Available:

                        The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.

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                          17Chemical mechanical planarization VI

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                          Book's cover

                          “Chemical mechanical planarization VI” Metadata:

                          • Title: ➤  Chemical mechanical planarization VI
                          • Author: ➤  
                          • Language: English
                          • Number of Pages: Median: 358
                          • Publisher: Electrochemical Society
                          • Publish Date:
                          • Publish Location: Pennington, NJ

                          “Chemical mechanical planarization VI” Subjects and Themes:

                          Edition Identifiers:

                          Access and General Info:

                          • First Year Published: 2003
                          • Is Full Text Available: No
                          • Is The Book Public: No
                          • Access Status: No_ebook

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                          18Chemical mechanical planarization V

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                          “Chemical mechanical planarization V” Metadata:

                          • Title: ➤  Chemical mechanical planarization V
                          • Author: ➤  
                          • Language: English
                          • Number of Pages: Median: 274
                          • Publisher: Electrochemical Society, Inc.
                          • Publish Date:
                          • Publish Location: Pennington, NJ

                          “Chemical mechanical planarization V” Subjects and Themes:

                          Edition Identifiers:

                          Access and General Info:

                          • First Year Published: 2002
                          • Is Full Text Available: No
                          • Is The Book Public: No
                          • Access Status: No_ebook

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                          19Advanced interconnects and chemical mechanical planarization for micro- and nanoelectronics

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                          “Advanced interconnects and chemical mechanical planarization for micro- and nanoelectronics” Metadata:

                          • Title: ➤  Advanced interconnects and chemical mechanical planarization for micro- and nanoelectronics
                          • Author: ➤  
                          • Language: English
                          • Number of Pages: Median: 342
                          • Publisher: Materials Research Society
                          • Publish Date:
                          • Publish Location: Warrendale, Pa

                          “Advanced interconnects and chemical mechanical planarization for micro- and nanoelectronics” Subjects and Themes:

                          Edition Identifiers:

                          Access and General Info:

                          • First Year Published: 2010
                          • Is Full Text Available: No
                          • Is The Book Public: No
                          • Access Status: No_ebook

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                          20Advances and challenges in chemical mechanical planarization

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                          “Advances and challenges in chemical mechanical planarization” Metadata:

                          • Title: ➤  Advances and challenges in chemical mechanical planarization
                          • Author: ➤  
                          • Language: English
                          • Number of Pages: Median: 371
                          • Publisher: ➤  Materials Research Society, c2007.
                          • Publish Date:
                          • Publish Location: Warrendale, Pa

                          “Advances and challenges in chemical mechanical planarization” Subjects and Themes:

                          Edition Identifiers:

                          Access and General Info:

                          • First Year Published: 2007
                          • Is Full Text Available: No
                          • Is The Book Public: No
                          • Access Status: No_ebook

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                          21Advanced CMP processes for special substrates and for device manufacturing in MEMS applications

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                          “Advanced CMP processes for special substrates and for device manufacturing in MEMS applications” Metadata:

                          • Title: ➤  Advanced CMP processes for special substrates and for device manufacturing in MEMS applications
                          • Author:
                          • Language: English
                          • Publisher: ➤  VTT Technical Research Centre of Finland
                          • Publish Date:
                          • Publish Location: [Espoo, Finland]

                          “Advanced CMP processes for special substrates and for device manufacturing in MEMS applications” Subjects and Themes:

                          Edition Identifiers:

                          Access and General Info:

                          • First Year Published: 2006
                          • Is Full Text Available: No
                          • Is The Book Public: No
                          • Access Status: No_ebook

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                          22Chemical mechanical planarization IV

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                          Book's cover

                          “Chemical mechanical planarization IV” Metadata:

                          • Title: ➤  Chemical mechanical planarization IV
                          • Author: ➤  
                          • Language: English
                          • Number of Pages: Median: 338
                          • Publisher: Electrochemical Society, Inc.
                          • Publish Date:
                          • Publish Location: Pennington, NJ

                          “Chemical mechanical planarization IV” Subjects and Themes:

                          Edition Identifiers:

                          Access and General Info:

                          • First Year Published: 2001
                          • Is Full Text Available: No
                          • Is The Book Public: No
                          • Access Status: No_ebook

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                          23Advances in Chemical-Mechanical Polishing

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                          Book's cover

                          “Advances in Chemical-Mechanical Polishing” Metadata:

                          • Title: ➤  Advances in Chemical-Mechanical Polishing
                          • Author:
                          • Language: English
                          • Number of Pages: Median: 292
                          • Publisher: Materials Research Society
                          • Publish Date:

                          “Advances in Chemical-Mechanical Polishing” Subjects and Themes:

                          Edition Identifiers:

                          Access and General Info:

                          • First Year Published: 2004
                          • Is Full Text Available: No
                          • Is The Book Public: No
                          • Access Status: No_ebook

                          Online Access

                          Downloads Are Not Available:

                          The book is not public therefore the download links will not allow the download of the entire book, however, borrowing the book online is available.

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                            24Proceedings of the First International Symposium on Chemical Mechanical Planarization

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                            Book's cover

                            “Proceedings of the First International Symposium on Chemical Mechanical Planarization” Metadata:

                            • Title: ➤  Proceedings of the First International Symposium on Chemical Mechanical Planarization
                            • Author: ➤  
                            • Language: English
                            • Number of Pages: Median: 275
                            • Publisher: Electrochemical Society
                            • Publish Date:
                            • Publish Location: Pennington, NJ

                            “Proceedings of the First International Symposium on Chemical Mechanical Planarization” Subjects and Themes:

                            Edition Identifiers:

                            Access and General Info:

                            • First Year Published: 1997
                            • Is Full Text Available: No
                            • Is The Book Public: No
                            • Access Status: No_ebook

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                            25Science and technology of chemical mechanical planarization (CMP)

                            By

                            “Science and technology of chemical mechanical planarization (CMP)” Metadata:

                            • Title: ➤  Science and technology of chemical mechanical planarization (CMP)
                            • Author: ➤  
                            • Language: English
                            • Number of Pages: Median: 165
                            • Publisher: Materials Research Society
                            • Publish Date:
                            • Publish Location: Warrendale, Penn

                            “Science and technology of chemical mechanical planarization (CMP)” Subjects and Themes:

                            Edition Identifiers:

                            Access and General Info:

                            • First Year Published: 2010
                            • Is Full Text Available: No
                            • Is The Book Public: No
                            • Access Status: No_ebook

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                            26Advances in CMP/polishing technologies for the manufacture of electronic devices

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                            Book's cover

                            “Advances in CMP/polishing technologies for the manufacture of electronic devices” Metadata:

                            • Title: ➤  Advances in CMP/polishing technologies for the manufacture of electronic devices
                            • Authors:
                            • Language: English
                            • Number of Pages: Median: 317
                            • Publisher: Elsevier - William Andrew
                            • Publish Date:
                            • Publish Location: New York - Oxford

                            “Advances in CMP/polishing technologies for the manufacture of electronic devices” Subjects and Themes:

                            Edition Identifiers:

                            Access and General Info:

                            • First Year Published: 2012
                            • Is Full Text Available: No
                            • Is The Book Public: No
                            • Access Status: No_ebook

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                            27Nanoparticle engineering for chemical-mechanical planarization

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                            Book's cover

                            “Nanoparticle engineering for chemical-mechanical planarization” Metadata:

                            • Title: ➤  Nanoparticle engineering for chemical-mechanical planarization
                            • Author:
                            • Language: English
                            • Publisher: Taylor & Francis
                            • Publish Date:
                            • Publish Location: Boca Raton

                            “Nanoparticle engineering for chemical-mechanical planarization” Subjects and Themes:

                            Edition Identifiers:

                            Access and General Info:

                            • First Year Published: 2009
                            • Is Full Text Available: No
                            • Is The Book Public: No
                            • Access Status: No_ebook

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                            28Microelectronic applications of chemical mechanical planarization

                            Book's cover

                            “Microelectronic applications of chemical mechanical planarization” Metadata:

                            • Title: ➤  Microelectronic applications of chemical mechanical planarization
                            • Language: English
                            • Publisher: John Wiley
                            • Publish Date:
                            • Publish Location: Hoboken, N.J

                            “Microelectronic applications of chemical mechanical planarization” Subjects and Themes:

                            Edition Identifiers:

                            Access and General Info:

                            • First Year Published: 2007
                            • Is Full Text Available: No
                            • Is The Book Public: No
                            • Access Status: No_ebook

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