Chemical-Mechanical Planarization--Integration, Technology and Reliability - Info and Reading Options
Symposium Held March 28-31, 2005, San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)
By Ashok Kumar
"Chemical-Mechanical Planarization--Integration, Technology and Reliability" was published by Materials Research Society in January 2005, it has 302 pages and the language of the book is English.
“Chemical-Mechanical Planarization--Integration, Technology and Reliability” Metadata:
- Title: ➤ Chemical-Mechanical Planarization--Integration, Technology and Reliability
- Author: Ashok Kumar
- Language: English
- Number of Pages: 302
- Publisher: Materials Research Society
- Publish Date: January 2005
“Chemical-Mechanical Planarization--Integration, Technology and Reliability” Subjects and Themes:
- Subjects: ➤ Microelectronics - Grinding and polishing - Metals, pickling - Semiconductors - Congresses - Materials - Metals - Pickling - Surfaces - Chemical mechanical planarization
Edition Specifications:
- Format: Hardcover
Edition Identifiers:
- The Open Library ID: OL12092043M - OL9082337W
- Online Computer Library Center (OCLC) ID: 61263882
- Library of Congress Control Number (LCCN): 2005285362
- ISBN-13: 9781558998209
- ISBN-10: 1558998209
- All ISBNs: 1558998209 - 9781558998209
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