Semiconductor Lithography - Info and Reading Options
Principles, Practices, and Materials (Microdevices)
By Wayne M. Moreau
"Semiconductor Lithography" is published by Springer in December 31, 1987, it has 952 pages and the language of the book is English.
“Semiconductor Lithography” Metadata:
- Title: Semiconductor Lithography
- Author: Wayne M. Moreau
- Language: English
- Number of Pages: 952
- Publisher: Springer
- Publish Date: December 31, 1987
“Semiconductor Lithography” Subjects and Themes:
- Subjects: Microlithography - Photoresists - Semiconductors
Edition Specifications:
- Format: Paperback
- Weight: 4 pounds
- Dimensions: 10.5 x 7 x 2 inches
Edition Identifiers:
- The Open Library ID: OL10323677M - OL4980162W
- Online Computer Library Center (OCLC) ID: 16871199
- Library of Congress Control Number (LCCN): 87029077
- ISBN-13: 9780306421853
- ISBN-10: 0306421852
- All ISBNs: 0306421852 - 9780306421853
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