Microlithography - Info and Reading Options
process technology for IC fabrication
By David J. Elliott
"Microlithography" was published by McGraw-Hill in 1986 - New York, it has 378 pages and the language of the book is English.
“Microlithography” Metadata:
- Title: Microlithography
- Author: David J. Elliott
- Language: English
- Number of Pages: 378
- Publisher: McGraw-Hill
- Publish Date: 1986
- Publish Location: New York
“Microlithography” Subjects and Themes:
- Subjects: ➤ Very large scale integration - Design and construction - Microlithography - Integrated circuits - Photoresists - Integrated circuits -- Very large scale integration -- Design and construction
Edition Specifications:
- Pagination: xix, 378 p. :
Edition Identifiers:
- The Open Library ID: OL2537323M - OL2927174W
- Online Computer Library Center (OCLC) ID: 12418734
- Library of Congress Control Number (LCCN): 85018196
- ISBN-10: 0070193045
- All ISBNs: 0070193045
AI-generated Review of “Microlithography”:
"Microlithography" Description:
The Open Library:
xix, 378 pages : 24 cm
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