Microelectronics technology and process integration - Info and Reading Options
20-21 October 1994, Austin, Texas
By S. P. Murarka
"Microelectronics technology and process integration" was published by SPIE in 1994 - Bellingham, Wash., USA, it has 290 pages and the language of the book is English.
“Microelectronics technology and process integration” Metadata:
- Title: ➤ Microelectronics technology and process integration
- Author: S. P. Murarka
- Language: English
- Number of Pages: 290
- Publisher: SPIE
- Publish Date: 1994
- Publish Location: Bellingham, Wash., USA
“Microelectronics technology and process integration” Subjects and Themes:
- Subjects: ➤ Congresses - Plasma etching - Dielectric films - Metallizing - Integrated circuits - Design and construction
Edition Specifications:
- Pagination: ix, 290 p. :
Edition Identifiers:
- The Open Library ID: OL1125383M - OL23536566W
- Online Computer Library Center (OCLC) ID: 31210232
- Library of Congress Control Number (LCCN): 94067261
- ISBN-10: 0819416681
- All ISBNs: 0819416681
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