Advances in resist technology and processing XIII - Info and Reading Options
11-13 March 1996, Santa Clara, California
By Roderick R. Kunz

"Advances in resist technology and processing XIII" was published by International Society for Optical Engineering in 1996 - Bellingham, Wash., USA, it has 774 pages and the language of the book is English.
“Advances in resist technology and processing XIII” Metadata:
- Title: ➤ Advances in resist technology and processing XIII
- Author: Roderick R. Kunz
- Language: English
- Number of Pages: 774
- Publisher: ➤ International Society for Optical Engineering
- Publish Date: 1996
- Publish Location: Bellingham, Wash., USA
“Advances in resist technology and processing XIII” Subjects and Themes:
- Subjects: Photoresists - Congresses - Microlithography
Edition Specifications:
- Pagination: xi, 774 p. :
Edition Identifiers:
- The Open Library ID: OL20738182M - OL9620717W
- ISBN-10: 0819421006
- All ISBNs: 0819421006
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