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1Reactive ion etching of polyimide films using a radio frequency discharge

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“Reactive ion etching of polyimide films using a radio frequency discharge” Metadata:

  • Title: ➤  Reactive ion etching of polyimide films using a radio frequency discharge
  • Author:
  • Number of Pages: Median: 108
  • Publisher: ➤  Rochester Institute of Technology, Materials Science and Engineering
  • Publish Date:
  • Publish Location: Rochester N. Y

“Reactive ion etching of polyimide films using a radio frequency discharge” Subjects and Themes:

Edition Identifiers:

Access and General Info:

  • First Year Published: 1987
  • Is Full Text Available: No
  • Is The Book Public: No
  • Access Status: No_ebook

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