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Source: The Open Library
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1Reactive Sputter Deposition
By D. Depla
“Reactive Sputter Deposition” Metadata:
- Title: Reactive Sputter Deposition
- Author: D. Depla
- Language: English
- Publisher: ➤ Springer-Verlag Berlin Heidelberg
- Publish Date: 2008
- Publish Location: Berlin, Heidelberg
“Reactive Sputter Deposition” Subjects and Themes:
- Subjects: ➤ Physical organic chemistry - Surfaces (Physics) - Chemical engineering - Condensed matter - Sputtering (physics) - Thin films - Plating - Cathode sputtering (Plating process) - Pulvérisation cathodique - Applications industrielles - Couches minces - Magnetronsputtern - PVD-Verfahren - Reaktives Sputtern
Edition Identifiers:
- The Open Library ID: OL25564502M
- Online Computer Library Center (OCLC) ID: 191760096
- Library of Congress Control Number (LCCN): 2007938637
- All ISBNs: 3540766642 - 9783540766629 - 3540766626 - 9783540766643
Access and General Info:
- First Year Published: 2008
- Is Full Text Available: No
- Is The Book Public: No
- Access Status: Unclassified
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