Plasma-surface interactions and processing of materials - Info and Reading Options
[proceedings of the NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials, Alicante, Spain, September 4-16, 1988]
By NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials (1988 Alicante, Spain)
"Plasma-surface interactions and processing of materials" was published by Kluwer Academic Publishers in 1990 - Dordrecht, it has 557 pages and the language of the book is English.
“Plasma-surface interactions and processing of materials” Metadata:
- Title: ➤ Plasma-surface interactions and processing of materials
- Author: ➤ NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials (1988 Alicante, Spain)
- Language: English
- Number of Pages: 557
- Publisher: Kluwer Academic Publishers
- Publish Date: 1990
- Publish Location: Dordrecht
“Plasma-surface interactions and processing of materials” Subjects and Themes:
- Subjects: ➤ Congresses - Effect of radiation on - Materials - Microelectronics - Plasma etching - Surfaces (Technology) - Materials, effect of radiation on
Edition Specifications:
- Pagination: xiii, 557 p. :
Edition Identifiers:
- The Open Library ID: OL2219466M - OL4804521W
- Online Computer Library Center (OCLC) ID: 507245714
- Library of Congress Control Number (LCCN): 89048126
- ISBN-10: 0792305841
- All ISBNs: 0792305841
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