Nano-lithography
By Stefan Landis
"Nano-lithography" was published by ISTE in 2011 - London, UK, it has 325 pages and the language of the book is English.
“Nano-lithography” Metadata:
- Title: Nano-lithography
- Author: Stefan Landis
- Language: English
- Number of Pages: 325
- Publisher: ISTE
- Publish Date: 2011
- Publish Location: London, UK
“Nano-lithography” Subjects and Themes:
- Subjects: Nanotechnology - Microlithography - Nanolithography - Lithography
Edition Specifications:
- Pagination: xxv, 325 p. :
Edition Identifiers:
- The Open Library ID: OL24881665M - OL15976575W
- Online Computer Library Center (OCLC) ID: 642840091 - 876268808
- Library of Congress Control Number (LCCN): 2010046516
- ISBN-13: 9781848212114
- ISBN-10: 1848212119
- All ISBNs: 1848212119 - 9781848212114
AI-generated Review of “Nano-lithography”:
"Nano-lithography" Table Of Contents:
- 1- Ch. 1. X-ray lithography : fundamentals and applications
- 2- ch. 2. NanoImprint lithography
- 3- ch. 3. Lithography techniques using scanning probe microscopy
- 4- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures
- 5- ch. 5. Patterning with self-assembling block copolymers
- 6- ch. 6. Metrology for lithography.
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