Laser microfabrication - Info and Reading Options
thin film processes and lithography
By Daniel J. Ehrlich and Jeffrey Y. Tsao
"Laser microfabrication" was published by Academic Press in 1989 - Boston, it has 587 pages and the language of the book is English.
“Laser microfabrication” Metadata:
- Title: Laser microfabrication
- Authors: Daniel J. EhrlichJeffrey Y. Tsao
- Language: English
- Number of Pages: 587
- Publisher: Academic Press
- Publish Date: 1989
- Publish Location: Boston
“Laser microfabrication” Subjects and Themes:
- Subjects: ➤ Thin film devices - Microfabrication - Lasers - Microlithography - Industrial applications - Design and construction - Lasers, industrial applications - Thin films
Edition Specifications:
- Pagination: xii, 587 p. :
Edition Identifiers:
- The Open Library ID: OL2047026M - OL18844859W
- Library of Congress Control Number (LCCN): 88024215
- ISBN-10: 0122334302
- All ISBNs: 0122334302
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