Dry etching for microelectronics - Info and Reading Options
By Ronald A. Powell
"Dry etching for microelectronics" was published by North-Holland Physics Pub. in 1984 - Amsterdam, it has 299 pages and the language of the book is English.
“Dry etching for microelectronics” Metadata:
- Title: ➤ Dry etching for microelectronics
- Author: Ronald A. Powell
- Language: English
- Number of Pages: 299
- Publisher: North-Holland Physics Pub.
- Publish Date: 1984
- Publish Location: Amsterdam
“Dry etching for microelectronics” Subjects and Themes:
- Subjects: Semiconductors - Etching - Plasma etching
Edition Specifications:
- Pagination: xi, 299 p. :
Edition Identifiers:
- The Open Library ID: OL2839348M - OL22821615W
- Online Computer Library Center (OCLC) ID: 10913832
- Library of Congress Control Number (LCCN): 84001145
- ISBN-10: 0444869050
- All ISBNs: 0444869050
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