Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
standard reference materials
By Carol F. Vezzetti
"Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems" is published by U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology in 1992 - Gaithersburg, MD, it has 36 pages and the language of the book is English.
“Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems” Metadata:
- Title: ➤ Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
- Author: Carol F. Vezzetti
- Language: English
- Number of Pages: 36
- Publisher: ➤ U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
- Publish Date: 1992
- Publish Location: Gaithersburg, MD
“Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems” Subjects and Themes:
- Subjects: ➤ Calibration - Chromium - Integrated circuits - Masks - Measurement - Microscopes - Spectra - Standards
Edition Specifications:
- Pagination: xii, 36 p. :
Edition Identifiers:
- The Open Library ID: OL1525737M - OL3862272W
- Library of Congress Control Number (LCCN): 93215842
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