Micro electro mechanical systems: An investigation of micro structures, sensors, actuators, machines, and systems
proceedings
By IEEE Robotics and Automation Society
"Micro electro mechanical systems: An investigation of micro structures, sensors, actuators, machines, and systems " was published by IEEE Service Center in 1993, it has 294 pages and the language of the book is English.
“Micro electro mechanical systems: An investigation of micro structures, sensors, actuators, machines, and systems ” Metadata:
- Title: ➤ Micro electro mechanical systems: An investigation of micro structures, sensors, actuators, machines, and systems
- Author: ➤ IEEE Robotics and Automation Society
- Language: English
- Number of Pages: 294
- Publisher: IEEE Service Center
- Publish Date: 1993
“Micro electro mechanical systems: An investigation of micro structures, sensors, actuators, machines, and systems ” Subjects and Themes:
- Subjects: Actuators - Detectors - Electromechanical devices - Microelectronics - Congresses
Edition Specifications:
- Format: Unknown Binding
Edition Identifiers:
- The Open Library ID: OL8082525M - OL18977999W
- ISBN-13: 9780780309593
- ISBN-10: 0780309596
- All ISBNs: 0780309596 - 9780780309593
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