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"Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting" was published by Springer Berlin / Heidelberg in 2015 - Berlin, Heidelberg, it has 122 pages and the language of the book is English.


“Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting” Metadata:

  • Title: ➤  Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
  • Author:
  • Language: English
  • Number of Pages: 122
  • Publisher: Springer Berlin / Heidelberg
  • Publish Date:
  • Publish Location: Berlin, Heidelberg

“Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting” Subjects and Themes:

Edition Specifications:

  • Weight: 3.435

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"Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting" Description:

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This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem

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