Materials science of microelectromechanical systems (MEMS) devices II - Info and Reading Options
By Eric Peeters
“Materials science of microelectromechanical systems (MEMS) devices II” Metadata:
- Title: ➤ Materials science of microelectromechanical systems (MEMS) devices II
- Author: Eric Peeters
“Materials science of microelectromechanical systems (MEMS) devices II” Subjects and Themes:
- Subjects: Microelectromechanical systems - Microactuators - Materials - Congresses - Microelectronics
Edition Identifiers:
- The Open Library ID: OL20979260W
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