"Introductory MEMS" - Information and Links:

Introductory MEMS - Info and Reading Options

fabrication and applications

Book's cover
The cover of “Introductory MEMS” - Open Library.

"Introductory MEMS" was published by Springer in 2010 - New York, it has 444 pages and the language of the book is English.


“Introductory MEMS” Metadata:

  • Title: Introductory MEMS
  • Author:
  • Language: English
  • Number of Pages: 444
  • Publisher: Springer
  • Publish Date:
  • Publish Location: New York

“Introductory MEMS” Subjects and Themes:

Edition Specifications:

  • Pagination: xv, 444 p. :

Edition Identifiers:

AI-generated Review of “Introductory MEMS”:


"Introductory MEMS" Table Of Contents:

  • 1- 1. Introduction
  • 2- 2. The substrate and adding material to it
  • 3- 3. Creating and transferring patterns- photolithography
  • 4- 4. Creating structures - micromachining
  • 5- 5. Solid mechanics
  • 6- 6. Thinking about modeling
  • 7- 7. MEMS transducers
  • 8- 8. Piezoresistive transducers
  • 9- 9. Capacitive transducers
  • 10- 10. Piezoelectric transducers
  • 11- 11. Thermal transducers
  • 12- 12. Introduction to microfluidics
  • 13- 13. Microfabrication laboratories.

Read “Introductory MEMS”:

Read “Introductory MEMS” by choosing from the options below.

Search for “Introductory MEMS” downloads:

Visit our Downloads Search page to see if downloads are available.

Find “Introductory MEMS” in Libraries Near You:

Read or borrow “Introductory MEMS” from your local library.

Buy “Introductory MEMS” online:

Shop for “Introductory MEMS” on popular online marketplaces.



Find "Introductory MEMS" in Wikipdedia