Introductory MEMS - Info and Reading Options
fabrication and applications
By Thomas M. Adams

"Introductory MEMS" was published by Springer in 2010 - New York, it has 444 pages and the language of the book is English.
“Introductory MEMS” Metadata:
- Title: Introductory MEMS
- Author: Thomas M. Adams
- Language: English
- Number of Pages: 444
- Publisher: Springer
- Publish Date: 2010
- Publish Location: New York
“Introductory MEMS” Subjects and Themes:
- Subjects: ➤ Microelectromechanical systems - Electronic apparatus and appliances - MEMS - Transducers - Computer programs - Computer science - Parallel processing (Electronic computers) - Congresses - Semantics - Programming languages (Electronic computers) - Programming languages (electronic computers) - Sequential machine theory - Formal languages - Sequential machine theory--congresses - Formal languages--congresses - Programming languages (electronic computers)--congresses
Edition Specifications:
- Pagination: xv, 444 p. :
Edition Identifiers:
- The Open Library ID: OL24879997M - OL15974850W
- Online Computer Library Center (OCLC) ID: 535508588 - 5101221 - 5101304
- Library of Congress Control Number (LCCN): 2009939153 - 79015956 - 79015859
- ISBN-13: 9780387095103 - 9780387095110
- ISBN-10: 0387095101 - 038709511X
- All ISBNs: 0387095101 - 038709511X - 9780387095103 - 9780387095110
AI-generated Review of “Introductory MEMS”:
"Introductory MEMS" Table Of Contents:
- 1- 1. Introduction
- 2- 2. The substrate and adding material to it
- 3- 3. Creating and transferring patterns- photolithography
- 4- 4. Creating structures - micromachining
- 5- 5. Solid mechanics
- 6- 6. Thinking about modeling
- 7- 7. MEMS transducers
- 8- 8. Piezoresistive transducers
- 9- 9. Capacitive transducers
- 10- 10. Piezoelectric transducers
- 11- 11. Thermal transducers
- 12- 12. Introduction to microfluidics
- 13- 13. Microfabrication laboratories.
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