EUV lithography - Info and Reading Options
By Vivek Bakshi
"EUV lithography" was published by SPIE in 2007 - Bellingham, Wash and the language of the book is English.
“EUV lithography” Metadata:
- Title: EUV lithography
- Author: Vivek Bakshi
- Language: English
- Publisher: SPIE
- Publish Date: 2007
- Publish Location: Bellingham, Wash
“EUV lithography” Subjects and Themes:
- Subjects: ➤ Ultraviolet radiation - Industrial applications - Optical coatings - Photolithography - Optics - Rayonnement ultraviolet - Applications industrielles - Photolithographie - Revêtements optiques
Edition Specifications:
- Pagination: p. cm.
Edition Identifiers:
- The Open Library ID: OL16819819M - OL11938257W
- Online Computer Library Center (OCLC) ID: 226308133
- Library of Congress Control Number (LCCN): 2008018045
- ISBN-13: 9780819469649
- All ISBNs: 9780819469649
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