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Modeling of Dielectric Barrier Discharge allow for the study of basic plasma processes, and also enable analysis and optimization of current technologies using plasmas, as well as predicting the performance of as-yetunbuilt systems for new applications. Modeling of Dielectric Barrier Discharge (DBD) allow for the study of basic plasma processes, and also enable analysis and optimization of current technologies using plasmas, as well as predicting the performance of as-yet-unbuilt systems for new applications. These discharges are sometimes called silent discharges; usually operate at frequencies between 0.05 and 500 kHz. It is known that DBD generates non-thermal equilibrium plasma even under atmospheric pressure, which is suitable for ozone production [1]. Copious quantities of reactive oxygen species are often generated in atmospheric pressure plasmas. The reactive species and amounts generated depend on plasma parameters, such as the rotational, vibrational, excitation temperature and electron density [2]. This work represents a contribution of modeling of Dielectric Barrier Discharge in oxygen by using Comsol Multiphysics software, the powered electrode is driven by sinusoidal high voltage under 50 kHz of frequency, and the chemical model contains 75 reactions with a various species, where the electron collision with the heavy species included in this work are taken from the references [3.4]. The simulation results show an ozone molecules density and oxygen density and the others species.

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