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Multilayer cantilever structures are widely applied in micro/nanosystems. Unfortunately, the manufacturability/planarity/reliability has been always inadequate. While much of the understanding regarding the thermomechanical behavior of layered systems derives from experiences in microelectronics, significant differences exist for many micro/nanosystem applications, and these must be well understood to optimize the design of reliable MEMS/NEMS. The overall objectives of this work is to contribute to the scientific understanding of micro- and nano- mechanics of MEMS/NEMS thin film materials so as to develop a revolutionary approach to the design and fabrication of robust, multilayer microcantilever structures and systems for next-generation sensing and imaging applications. This research focuses on understanding the deformation mechanisms in MEMS/NEMS thin film materials, relating these behaviors to the design and analysis of MEMS/NEMS, and applying these principles to improve the performance of the devices/systems in the sub-micron scale. To this end, this research retains a balance between the experimental characterization and theoretical model of small-scale and materials. Because this research leads to a better understanding of micro- and nanomechanics of multilayer thin films, it will potentially have a broader impact on the enhancement and improvement of a variety of micro/nanosystems for the future needs of the US Air Force.