Device and process technologies for MEMS and microelectronics II - Info and Reading Options
17-19 December, 2001, Adelaide, Australia
By Jung-Chih Chiao
"Device and process technologies for MEMS and microelectronics II" was published by SPIE in 2001 - Bellingham, Wash, it has 538 pages and the language of the book is English.
“Device and process technologies for MEMS and microelectronics II” Metadata:
- Title: ➤ Device and process technologies for MEMS and microelectronics II
- Author: Jung-Chih Chiao
- Language: English
- Number of Pages: 538
- Publisher: SPIE
- Publish Date: 2001
- Publish Location: Bellingham, Wash
“Device and process technologies for MEMS and microelectronics II” Subjects and Themes:
- Subjects: ➤ Microelectromechanical systems - Congresses - Photolithography - Photomechanical processes - Photon detectors - Design and construction
Edition Specifications:
- Pagination: xi, 538 p. :
Edition Identifiers:
- The Open Library ID: OL3582956M - OL18937696W
- Online Computer Library Center (OCLC) ID: 49052655
- Library of Congress Control Number (LCCN): 2002280119
- ISBN-10: 0819443220
- All ISBNs: 0819443220
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