Assessing and characterizing inter- and intra-die variation using a statistical metrology framework - Info and Reading Options
a CMP case study
"Assessing and characterizing inter- and intra-die variation using a statistical metrology framework" was published by Hewlett-Packard Laboratories, Technical Publications Dept. in 1997 - Palo Alto, Calif and the language of the book is English.
“Assessing and characterizing inter- and intra-die variation using a statistical metrology framework” Metadata:
- Title: ➤ Assessing and characterizing inter- and intra-die variation using a statistical metrology framework
- Language: English
- Publisher: ➤ Hewlett-Packard Laboratories, Technical Publications Dept.
- Publish Date: 1997
- Publish Location: Palo Alto, Calif
“Assessing and characterizing inter- and intra-die variation using a statistical metrology framework” Subjects and Themes:
- Subjects: Pickling - Statistics - Metals
Edition Specifications:
- Pagination: [2] p. :
Edition Identifiers:
- The Open Library ID: OL17597987M - OL18397763W
- Online Computer Library Center (OCLC) ID: 43731366
AI-generated Review of “Assessing and characterizing inter- and intra-die variation using a statistical metrology framework”:
"Assessing and characterizing inter- and intra-die variation using a statistical metrology framework" Description:
The Open Library:
Abstract: "A statistical metrology methodology has ben developed and used to study the contributions to spatial variation in ILD thickness remaining after chemical-mechanical polishing. New elements of statistical metrology are described, including a three-phase experimental approach and the use of a modified repeated measure analysis of variance technique."
Read “Assessing and characterizing inter- and intra-die variation using a statistical metrology framework”:
Read “Assessing and characterizing inter- and intra-die variation using a statistical metrology framework” by choosing from the options below.
Search for “Assessing and characterizing inter- and intra-die variation using a statistical metrology framework” downloads:
Visit our Downloads Search page to see if downloads are available.
Find “Assessing and characterizing inter- and intra-die variation using a statistical metrology framework” in Libraries Near You:
Read or borrow “Assessing and characterizing inter- and intra-die variation using a statistical metrology framework” from your local library.
Buy “Assessing and characterizing inter- and intra-die variation using a statistical metrology framework” online:
Shop for “Assessing and characterizing inter- and intra-die variation using a statistical metrology framework” on popular online marketplaces.
- Ebay: New and used books.