Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
By James E. Potzick
"Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems" is published by U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology in 1997 - Gaithersburg, MD, it has 23 pages and the language of the book is English.
“Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems” Metadata:
- Title: ➤ Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
- Author: James E. Potzick
- Language: English
- Number of Pages: 23
- Publisher: ➤ U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
- Publish Date: 1997
- Publish Location: Gaithersburg, MD
“Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems” Subjects and Themes:
- Subjects: ➤ Standards - Calibration - Spectra - Masks - Microscopes - Measurement - Chromium - Integrated circuits
Edition Specifications:
- Format: Microform
- Pagination: xiii, 23 p.
Edition Identifiers:
- The Open Library ID: OL22389277M - OL2897187W
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